Neto, L.G. ; Cirino, G.A. ; Mansano, R.D. ; Verdonck, P. ; Seabra, A.C.
Pub. info.:
Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA. pp.71-78, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering