1.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Eneman, G. ; Verheyen, P. ; Delhougne, R. ; Rooyackers, R. ; Loo, R. ; Vandervorst, W. ; De Meyer, K. ; Claeys, C.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.349-359,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings

Conference Proceedings
Eyben, P. ; Duhayon, N. ; Stuer, C. ; De Wolf, T. ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, V.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B2.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
3.

Conference Proceedings

Conference Proceedings
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669