1.

Conference Proceedings
Conference Proceedings
1. Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling
Eyben, P. ; Fouchier, M. ; Albart, P. ; Charon-Verstappen, J. ; Vandervorst, W.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.297-302,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
2.

Conference Proceedings
Conference Proceedings
2. Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy
Duhayon, N. ; Clarysse, T. ; Alvarez, D. ; Eyben, P. ; Fouchier, M. ; Vandervorst, W. ; Hellemans, L.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.293-304,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
3.

Conference Proceedings
Conference Proceedings
3. SSRM And SCM Observation Of Enhanced Lateral As- and BF2-Diffusion Induced By Nitride Spacers
Eyben, P. ; Duhayon, N. ; Stuer, C. ; De Wolf, T. ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, V.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B2.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
4.

Conference Proceedings
Conference Proceedings
4. SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Fouchier, M. ; Eyben, P. ; Alvarez, D. ; Duhayon, N. ; Xu, M.W. ; Brongersma, S. ; Lisoni, J. ; Vandervorst, W.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.607-616,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116