Clarysse, T. ; Vandervorst, W. ; Lindsay, R. ; Borden, P. ; Budiarto, E. ; Madsen, J. ; Nijmeijer, R.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.285-290, 2002. Warrendale, Pa.. Materials Research Society
Duhayon, N. ; Clarysse, T. ; Alvarez, D. ; Eyben, P. ; Fouchier, M. ; Vandervorst, W. ; Hellemans, L.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.293-304, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Satta, A. ; Simoen, E. ; Janssens, T. ; Benedetti, A. ; Clarysse, T. ; De Jaeger, B. ; Geenen, L. ; Brijs, B. ; Meuris, M. ; Vandervorst, W.
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Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.52-60, 2005. Pennington, N.J.. Electrochemical Society
Satta, A. ; Simoen, E. ; Meuris, M. ; Janssens, T. ; Clarysse, T. ; Demeurisse, C. ; Hoflijk, I. ; Vandervorst, W.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.468-475, 2005. Pennington, NJ. Electrochemical Society
Eyben, P. ; Duhayon, N. ; Stuer, C. ; De Wolf, T. ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, V.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B2.2-, 2001. Warrendale, PA. Materials Research Society
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
De Wolf, P. ; Trenkler, T. ; Clarysse, T. ; Vandervorst, W.
Pub. info.:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.92-101, 1997. Pennington, NJ. Electrochemical Society
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