1.

Conference Proceedings
Conference Proceedings
1. Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy
Duhayon, N. ; Clarysse, T. ; Alvarez, D. ; Eyben, P. ; Fouchier, M. ; Vandervorst, W. ; Hellemans, L.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.293-304,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Fouchier, M. ; Eyben, P. ; Alvarez, D. ; Duhayon, N. ; Xu, M.W. ; Brongersma, S. ; Lisoni, J. ; Vandervorst, W.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.607-616,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116