1.

Conference Proceedings
Conference Proceedings
1. Image enhancement through square illumination shaping
Smith, B.W. ; Vandenberghe, G.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1500-1503,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings
Conference Proceedings
2. Gray assist bar OPC
Lafferty, N.V. ; Vandenberghe, G. ; Smith, B.W. ; Lassiter, M. ; Martin, P.M.
Pub. info.: Optical Microlithography XVII.  pp.381-392,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377