1.

Conference Proceedings
Conference Proceedings
1. Optical extensions integration for a 0.314-μm2 45-nm node 6-transistor SRAM cell
Verhaegen, S. ; Nackaerts, A. ; Wiaux, V. ; Hendrickx, E. ; Vandenberghe, G.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.120-130,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Compensating measured intra-wafer ring oscillator stage delay with intra-wafer exposure dose corrections [6152-71]
Verhaegen, S. ; Nackaerts, A. ; Dusa, M. ; Carpaij, R. ; Vandenberghe, G. ; Finders, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152