1.

Conference Proceedings
Conference Proceedings
1. Comparison between positive and negative 50-k eV E-beam CAR for 0.1-μm generation
Lin, D. ; Hung, K. ; Lee, D. ; Chou, R.L. ; Unno, H. ; Yang, S.C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.241-251,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
2.

Conference Proceedings
Conference Proceedings
2. Comparsion and correlation of VSS simulation results using images from different inspection systems
Hung, K. ; Lin, D. ; Chou, R.L. ; Yang, S.C. ; Lee, D. ; Tseng, A. ; Unno, H. ; Chen, J.-H. ; Huang, J. H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.666-672,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754