1.
|
Conference Proceedings
|
Ito, H. ; Truong, H.D. ; Okazaki, M. ; Miller, D.C. ; Fender, N. ; Breyta, G. ; Brock, P.J. ; Wallraff, G.M. ; Larson, C.E. ; Allen, R.D.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part One pp.18-28, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
|
2.
|
Conference Proceedings
|
Li, W. ; Varanasi, P.R. ; Lawson, M.C. ; Kwong, R.W. ; Chen, K.-J. ; Ito, H. ; Truong, H.D. ; Allen, R.D. ; Yamamoto, M. ; Kobayashi, E. ; Slezak, M.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.61-69, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|