1.

Conference Proceedings
Conference Proceedings
1. Furnace oxynitridation in nitric oxide of thin silicon oxide: Atomic transport mechanisms and interfacial microstructure
Trimaille, I. ; Ganem, J-J. ; Gosset, L. G. ; Bailly, O. ; Rigo, S. ; Cantin, J-L. ; Bardeleben, H. J. von
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.269-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
2.

Conference Proceedings
Conference Proceedings
2. Atomic Transport During Thermal Nitridation of SiO2 Films in NH3 and During Subsequent Thermal Reoxidation
Baumvol, I.J.R. ; Breelle, E. ; Stedile, F.C. ; Ganem, J.-J. ; Trimaille, I. ; Rigo, S.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.97-108,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
3.

Conference Proceedings
Conference Proceedings
3. Mechanisms of Thermal Growth of Very Thin Films of SiO2 on Si(OO1) in Dry O2
Trimaille, I. ; Stedile, F.C. ; Ghanem, J.-J. ; Baumvol, I.J.R. ; Rigo, S.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.59-71,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1