1.

Conference Proceedings
Conference Proceedings
1. Mask blank particle inspection in vacuum environments
Sekine, A. ; Nagahama, H. ; Tojo, T. ; Akeno, K. ; Hirano, R.
Pub. info.: Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany.  pp.624-631,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4902
2.

Conference Proceedings
Conference Proceedings
2. A novel integrated catadioptric pick-up with ferrofluid cooling structure
Yamanaka, K. ; Okuda, T. ; Tojo, T. ; Ijima, S. ; Onozawa, K. ; Ueda, D. ; Kubo, J. ; Kitagawa, S.
Pub. info.: Advanced optical and quantum memories and computing : 27-28 January 2004, San Jose, California, USA.  pp.90-98,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5362
3.

Conference Proceedings
Conference Proceedings
3. Reduction of Stacking Faults in Fast Epitaxial Growth of 4H-SiC and its Impacts on High-Voltage Schottky Diodes
Fujiwara, H. ; Kimoto, T. ; Tojo, T. ; Matsunami, H.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.151-154,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485
4.

Conference Proceedings
Conference Proceedings
4. A New Electrode for the Production of Fluorine
Tojo, T. ; Hiraiwa, J. ; Watanabe, N.
Pub. info.: Proceedings of the International Symposium on Molten Salt Chemistry and Technology 1993.  pp.472-479,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-9
5.

Conference Proceedings
Conference Proceedings
5. Surface Treatment of SiC using NF3/O2 Plasmas
Kai, T.J ; Shimizu, W. ; Hibi, A. ; Iwase, T. ; Abe, T. ; Inaba, M. ; Ogumi, Z. ; Tojo, T. ; Tasaka, A.
Pub. info.: Plasma processing XIV : proceedings of the international symposium.  pp.84-91,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-17
6.

Conference Proceedings
Conference Proceedings
6. Electrolytic Synthesis of Perfluorotrimethylamine with Alkali Metal Fluroide Contained Carbon Anode
Tasaka, A. ; Miyasaka, A. ; Miyazaki, T. ; Takebayashi, H. ; Tojo, T. ; Momota, K.
Pub. info.: Molten Salts XIII : proceedings of the international symposium.  pp.937-945,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-19
7.

Conference Proceedings
Conference Proceedings
7. Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition
Fujiwara, H. ; Danno, K. ; Kimoto, T. ; Tojo, T. ; Matsunami, H.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.205-208,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
8.

Conference Proceedings
Conference Proceedings
8. Reduction of fogging effect caused by scattered electrons in an electron beam system
Shimomura, N. ; Ogasawara, M. ; Takamatsu, J. ; Yoshitake, S. ; Ooki, K. ; Nakayamada, N. ; Okabe, F. ; Tojo, T.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.408-415,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
9.

Conference Proceedings
Conference Proceedings
9. Lens-cementing technology used in optical system of DUV wavelength region: selection of optical cement and degradation evaluation by DUV irradiation [6152-149]
Takahashi, T. ; Saito, S. ; Okumura, T. ; Suzuki, E. ; Kojima, T. ; Motomiya, S. ; Maruyama, H. ; Suzuki, H. ; Machida, K. ; Tojo, T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61523P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
10.

Conference Proceedings
Conference Proceedings
10. Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Tojo, T. ; Yoshikawa, R. ; Ogawa, Y. ; Tamamushi, S. ; Hattori, Y. ; Koikari, S. ; Kusakabe, H. ; Abe, T. ; Ogasawara, M. ; Akeno, K. ; Anze, H. ; Hattori, K. ; Hirano, R. ; Yoshitake, S. ; Iijima, T. ; Ohtoshi, K. ; Matsuki, K. ; Shimomura, N. ; Yamada, N. ; Higurashi, H. ; Nakayamada, N. ; Fukudome, Y. ; Hara, S. ; Murakami, E. ; Kamikubo, T. ; Suzuki, Y. ; Oogi, S. ; Shimizu, M. ; Nishimura, S. ; Tsurumaki, H. ; Yasuda, S. ; Ooki, K. ; Koyama, K. ; Watanabe, S. ; Yano, M. ; Suzuki, H. ; Hoshino, H. ; Toriumi, M. ; Watanabe, O. ; Tsuji, K. ; Katayama, M. ; Tsuchiya, S. ; Suzuki, K. ; Kurasawa, S. ; Okuzono, K. ; Yamada, H. ; Handa, K. ; Suzuki, Y. ; Akiyama, T. ; Tada, Y. ; Noma, A. ; Takigawa, T.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.416-425,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748