1.

Conference Proceedings
Conference Proceedings
1. Effects of complementary phase-shift imaging on gate CD control
Nelson-Thomas,C. ; Kling,M.E. ; Thompson,M.A. ; Wang,R. ; Cave,N. ; Fu,C.-C.
Pub. info.: Optical Microlithography XIV.  4346  pp.464-470,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. "Polarized phase shift mask: concept, design, and potential advantages to photolithography process and physical design"
Wang,R. ; Grobman,W.D. ; Reich,A.J. ; Thompson,M.A.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.406-417,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562