1.

Conference Proceedings
Conference Proceedings
1. Aluminum Wiring Reliability of Fluorinated Amorphous Carbon Interlayer
Iguchi, M. ; Matsubara, Y. ; Ito, S. ; Endo, K. ; Koyanagi, K. ; Kishimoto, K. ; Gomi, H. ; Tatsumi, T. ; Horiuchi, T.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.341-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511
2.

Conference Proceedings
Conference Proceedings
2. Adhesion of a-C:F During Oxygen Plasma Annealing
Matsubara, Y. ; Endo, K. ; Tatsumi, T. ; Horiuchi, T.
Pub. info.: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.19-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 476
3.

Conference Proceedings
Conference Proceedings
3. Copper Damascene Using Low-Dielectric Constant Fluorinated Amorphous Carbon Interlayer
Matsubara, Y. ; Endo, K. ; Iguchi, M. ; Ito, N. ; Aoyama, K. ; Tatsumi, T. ; Horiuchi, T.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.291-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511