1.

Conference Proceedings
Conference Proceedings
1. Linkage design effect on the reliability of surface-micromachined microengines driving a load
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.215-226,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512
2.

Conference Proceedings
Conference Proceedings
2. Failure analysis of surface-micromachined microengines (Invited Paper)
Peterson,K.A. ; Tangyunyong,P. ; Pimentel,A.A.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.190-200,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512