1.

Conference Proceedings
Conference Proceedings
1. Vacuum spark for soft x-rays and the spherical pinch for EUV as point sources for microlithography
Wu,F.F. ; Tang,W. ; Wirpszo,K.W. ; Guo,X. ; Xu,M. ; Semyonov,O. ; Huang,C. ; Klibanov,L. ; Panarella,E.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.740-750,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
2.

Conference Proceedings
Conference Proceedings
2. Vacuum spark and spherical pinch x-ray/EUV point sources
Wu,F. ; Tang,W. ; Wirpszo,K.W. ; Panarella,E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.410-420,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676