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Conference Proceedings

1. HYDROGEN ADSORPTION EFFECTS ON THIN FILM GROWTH MODE STUDIED BY ION SCATTERING

Shoji, F. ; Sumitomo, K. ; Kinoshita, T. ; Tanaka, Y. ; Oura, K. ; Katayama, I.

Pub. info.:	Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.381-386, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	237

Conference Proceedings

2. Fabrication of 700V SiC-SIT with Ultra-Low On-Resistance of 1.01mΩ･cm2

Tanaka, Y. ; Yano, K. ; Okamoto, M. ; Takatsuka, A. ; Fukuda, K. ; Kasuga, M. ; Arai, K. ; Yatsuo, T.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1219-1222, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

3. Performance of 320x240 uncooled bolometer-type infrared focal plane arrays

Tanaka, Y. ; Tanaka, A. ; Iida, K. ; Sasaki, T. ; Tohyama, S. ; Ajisawa, A. ; Kawahara, A. ; Kurashina, S. ; Endoh, T. ; Kawano, K. ; Okuyama, K. ; Egashira, K. ; Aoki, H. ; Oda, N.

Pub. info.:	Infrared technology and applications XXIX : 21-25 April 2003, Orlando, Florida, USA. pp.414-424, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5074

Conference Proceedings

4. Design of acid labile protecting groups in chemically amplified resists

Fujita, J. ; Sasaki, K. ; Kameyama, Y. ; Chika, Y. ; Kashiwagi, T. ; Niinomi, T. ; Tanaka, Y. ; Tarutani, S. ; Ochiai, T.

Pub. info.:	Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.608-616, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3678

Conference Proceedings

5. Polarization Dependence of Amplitude Modulation by Guided Acoustic-Wave Brillouin Scattering

Tanaka, Y. ; Ogusu, K.

Pub. info.:	OFS-13 : 13th International Conference on Optical Fiber Sensors & Workshop on Device and System Technology toward Future Optical Fiber Communication and Sensing : April 12-16, 1999, Kyongju Hyundai Hotel, Kyongju, Korea. pp.116-119, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3746

Conference Proceedings

6. Efficient system identification algorithm using Monte Carlo filter and its application

Tanaka, Y. ; Sato, T.

Pub. info.:	Health monitoring and smart nondestructive evaluation of structural and biological systems III : 15-17 March 2004, San Diego, California, USA. pp.464-474, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5394

Conference Proceedings

7. 'Volcano' Reactions and Step Coverage in Oxide Vias Between Tungsten CVD and Bias SputteredTiN/Ti Films

Herner, S.B. ; Tanaka, Y. ; Zhang, H. ; Littau, K.A. ; Ghanayem, S.G.

Pub. info.:	Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.22-33, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-31

Conference Proceedings

8. Stabilization of M41S materials by trimethylsilylation

Tatsumi, T. ; Koyano, K. A. ; Tanaka, Y. ; Nakata, S.

Pub. info.:	Mesoporous molecular sieves 1998 : proceedings of the first international symposium, Baltimore, MD, U.S.A., July 10-12, 1998. pp.143-, 1998. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	117

Conference Proceedings

9. Solid-state 109Ag-MASNMR Spectroscopic Studies of Trisilver Dodecatungstophosphates

Nakata, S. ; Tanaka, Y. ; Baba, T. ; Ono, Y.

Pub. info.:	Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.135-, 1994. Tokyo. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	90

10.

Conference Proceedings

10. System tolerance of 64-mm-diameter magneto-optical disks with a 4.7-Gigabyte capacity

Tanaka, Y. ; Fujita, G. ; Sakamoto, T. ; Miki, T. ; Imanishi, S. ; Akiyama, Y. ; Fujiie, K. ; Hozumi, Y. ; Miyaoka, Y. ; Hongu, K. ; Koyama, O,

Pub. info.:	Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA. pp.474-481, 2004. Bellingham. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5380

11.

Conference Proceedings

11. Lifetime Control of the Minority Carrier in PiN Diodes by He+ Ion Implantation

Tanaka, Y. ; Kojima, K. ; Takao, K. ; Okamoto, M. ; Kawasaki, M. ; Takatsuka, A. ; Yatsuo, T. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.985-988, 2005. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	483-485

12.

Conference Proceedings

12. PREPARATION OF TITANIUM NITRIDE (TiN1-x-yCxOy) FROM Ti(Opri)4-TRIETHANOLAMINE CONDENSATION PRODUCT BY PYROLYSIS

Kuroda, K. ; Tanaka, Y. ; Sugahara, Y. ; Kato, C.

Pub. info.:	Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.575-580, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	121

13.

Conference Proceedings

13. HIGH RESOLUTION PLAN VIEW IMAGING OF CLEAN AND Au DEPOSITED Si(111) SURFACES

Ozawa, S. ; Tanaka, Y. ; Kobayashi, K. ; Yamamoto, N. ; Yagi, K.

Pub. info.:	Advances in surface and thin film diffraction : symposium held November 27-29, 1990, Boston, Massachusetts, U.S.A.. pp.189-192, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	208

14.

Conference Proceedings

14. PREPARATION OF HIGH Tc OXIDE SUPERCONDUCTING TAPE BY RF MAGNETRON SPUTTERING

Fukutomi, M. ; Tanaka, Y. ; Asano, T. ; Maeda, H. ; Takahara, H.

Pub. info.:	High-temperature superconductors : fundamental properties and novel materials processing : symposium held November 27-December 2, 1989, Boston, Massachusetts, U.S.A.. pp.1197-1200, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	169

15.

Conference Proceedings

15. The space research programme of Japan

Tanaka, Y.

Pub. info.:	Evolution in astrophysics : IUE astronomy in the era of new space missions : Proceedings of an international conference held in Toulouse, France, 29 May - 1 June 1990. pp.183-188, 1990. Paris, France. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	310

16.

Conference Proceedings

16. Synergetic Effect of Pd and Ag Dispersed on MgO in the Reduction of NO by H2 at Room Temperature

Naito, S. ; Tanaka, Y.

Pub. info.:	11th International Congress on Catalysis, 40th anniversary : Proceedings of the 11th ICC, Baltimore, MD, USA, June 30-July 5, 1996. Part A pp.1115-, 1996. New York. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	101

17.

Conference Proceedings

17. Evaluation of Water Adsorption on Different Kinds of Zeolite through the Monte-Carlo Simulation

Inui, T. ; Tanaka, Y.

Pub. info.:	Zeolite science 1994 : recent progress and discussions : supplementary materials to the 10th International Zeolite Conference, Garmisch-Partenkirchen, Germany, July 17-22, 1994. pp.229-, 1995. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	98

18.

Conference Proceedings

18. Coimplantation Effects of (C and Si)/Ga in 6H-SiC

Tanaka, Y. ; Kobayashi, N. ; Hasegawa, M. ; Ogura, M. ; Ishida, Y. ; Yoshida, S. ; Okumura, H. ; Tanoue, H.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.917-920, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

19.

Conference Proceedings

19. INVESTIGATION OF LUMINESCENCE AND ABSORPTION SPECTRA OF BEDT-TTF AND ITS ION RADICAL SALT

Kozlov, M. E. ; Tanaka, Y. ; Tokumoto, M. ; Tani, T.

Pub. info.:	Electrical, optical, and magnetic properties of organic solid state materials : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.343-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	328

20.

Conference Proceedings

20. Cooling Rate Dependence of Fatigue Lifetime (Nf) of Cu-Al-Ni Alloy Prepared by Liquid Quenching

Mori, K. ; Tanaka, Y. ; Furuya, S. ; Okada, T. ; Komatsuzaki, K. ; Nishi, Y.

Pub. info.:	Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.381-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	459

21.

Conference Proceedings

21. Scandium and Gallium Implantation Doping of Silicon Carbide

Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Koutzarov, I. ; Okumura, H. ; Yoshida, S. ; Ohshima, T.

Pub. info.:	Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.163-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	512

22.

Conference Proceedings

22. Structural and electrical properties of beryllium implanted silicon carbide

Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Tanoue, H. ; Gong, M. ; Chen, X. D. ; Fung, S. ; Beling, C. D.

Pub. info.:	Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.117-, 1999. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	572

23.

Conference Proceedings

23. Characterization of Si-O-C Ceramics Prepared by the Pyrolysis of Phenylsilicones

Tanaka, Y. ; Mori, C. ; Suzuki, N. ; Kasai, T. ; Iimura, K. ; Kato, T.

Pub. info.:	Proceedings of the International Conference on Colloid and Surface Science, Tokyo, Japan, November 5-8, 2000 : 25th Anniversary of the Division of Colloid and Surface Chemistry, the Chemical Society of Japan. pp.777-780, 2001. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	132

24.

Conference Proceedings

24. Low-Temperature Activation of the Ion-Implanted Dopants in 4H-SiC by Excimer Laser Annealing

Tanaka, Y. ; Tanoue, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.799-802, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

25.

Conference Proceedings

25. Anneal-less domain wall displacement detection of 15-Gbit/in2 land-groove recording using a deep groove substrate and a red laser

Sakamoto, T. ; Tanaka, Y. ; Imanishi, S. ; Furuki, M. ; Arakawa, N. ; Fujiie, K.

Pub. info.:	Optical data storage 2003 : 11-14 May 2003, Vancouver, British Columbia, Canada. pp.74-81, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5069

26.

Conference Proceedings

26. FUTURE SPACE ASTRONOMY PROGRAMME OF JAPAN

Tanaka, Y.

Pub. info.:	Hot thin plasmas in astrophysics. pp.429-, 1987. Dordrecht. Kluwer Academic Publishers
Title of ser.:	NATO ASI series. Series C, Mathematical and physical sciences
Ser. no.:	249

27.

Conference Proceedings

27. FIRST RESULTS FROM GINGA

Tanaka, Y.

Pub. info.:	Hot thin plasmas in astrophysics. pp.343-354, 1987. Dordrecht. Kluwer Academic Publishers
Title of ser.:	NATO ASI series. Series C, Mathematical and physical sciences
Ser. no.:	249

28.

Conference Proceedings

28. Phase-shifting interferometry using an SHG blue laser diode (Invited Paper)

Chen, J. ; Tanaka, Y. ; Kiyohara, M.

Pub. info.:	Advanced materials and devices for sensing and imaging II : 8-10 November 2004, Beijing, China. pp.1-9, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5633

29.

Conference Proceedings

29. Profilometry using two-photon absorption of silicon avalanche photodiode (Invited Paper)

Tanaka, Y. ; Kurokawa, T.

Pub. info.:	Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. pp.102-109, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4919

30.

Conference Proceedings

30. The phase-change optical disc with the data-recording rate of 216 Mbps

Shingai, H. ; Kato, T. ; Inoue, H. ; Hirata, H. ; Utsunomiya, H. ; Chihara, H. ; Tanaka, Y.

Pub. info.:	Optical data storage 2003 : 11-14 May 2003, Vancouver, British Columbia, Canada. pp.130-136, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5069

31.

Conference Proceedings

31. Achromatic coronagraph based on out-of-plane common-path nulling interferometer

Tavrov, A. V. ; Tanaka, Y. ; Shioda, T. ; Kurokawa, T. ; Takeda, M.

Pub. info.:	New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.824-830, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5491

32.

Conference Proceedings

32. *HIGH RESOLUTION PLAN VIEW IMAGING OF CLEAN AND Au DEPOSITED Si(111) SURFACES

Ozawa, S. ; Tanaka, Y. ; Kobayashi, K. ; Yamamoto, N. ; Yagi, K.

Pub. info.:	Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.311-314, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	202

33.

Conference Proceedings

33. Investigation of plasma-induced erosion of multilayer condenser optics

Tanaka, Y. ; Oizumi, H. ; Hashimoto, T. ; Kumasaka, F. ; Nishiyama, I. ; Abe, T. ; Mohri, H. ; Hayashi, N.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.128-139, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

34.

Conference Proceedings

34. The effects of vibration in air and in ultrahigh vacuum on solid lubricated bearings

Tanaka, Y. ; Obara, S. ; Sasaki, A. ; Imagawa, K. ; Maniwa, K.

Pub. info.:	10th European Space Mechanisms and Tribology Symposium, 24-26 September 2003, San Sebastián, Spain. pp.49-56, 2003. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	524

35.

Conference Proceedings

35. Black holes in X-ray binaries: X-ray properties of the galactic black hole candidates

Tanaka, Y.

Pub. info.:	Proceedings of the 23rd ESLAB Symposium on two topics in X-ray astronomy, Bologna, Italy, 13-20 September 1989. pp.3-14, 1989. Noordwijk. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	296

36.

Conference Proceedings

36. Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

Senzaki, J. ; Fukuda, K. ; Imai, S. ; Tanaka, Y. ; Kobayashi, N. ; Tanoue, H. ; Okushi, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.865-868, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

37.

Conference Proceedings

37. Hot-Implantation of Phosphorus Ions into 4H-SiC

Imai, S. ; Kobayashi, S. ; Shinohe, T. ; Fukuda, K. ; Tanaka, Y. ; Senzaki, J. ; Tanoue, H. ; Kobayashi, N. ; Okushi, H.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.861-864, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

38.

Conference Proceedings

38. Beryllium Implantation Doping of Silicon Carbide

Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Nishizawa, S. ; Hishita, S.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.953-956, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

39.

Conference Proceedings

39. Hall Effect Measurements At Low Temperature Of Arsenic Implanted Into 4H-Silicon Carbide

Senzaki, J. ; Fukuda, K. ; Ishida, Y. ; Tanaka, Y. ; Tanoue, H. ; Kobayashi, N. ; Tanaka, T. ; Arai, K.

Pub. info.:	Wide-bandgap electronic devices. pp.T6.7-, 2001. Warrendale, PA.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	622

40.

Conference Proceedings

40. Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Henkel, T. ; Ferro, G. ; Nishizawa, S. ; Pressler, H. ; Tanaka, Y. ; Tanoue, H. ; Kobayashi, N.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.481-484, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(1)

41.

Conference Proceedings

41. Electrical and Structural Properties of Al and B Implanted 4H-SiC

Tanaka, Y. ; Kobayashi, N. ; Okumura, H. ; Suzuki, R. ; Ohdaira, T. ; Hasegawa, M. ; Ogura, M. ; Yoshida, S. ; Tanoue, H.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.909-912, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

42.

Conference Proceedings

42. Measurements of Magnetic Compton Profiles of Amorphous Fe-Tb Thin Films Using Circularly Polarized X-Rays

Kim, C.W. ; Tanaka, Y. ; Sakurai, Y. ; Nanao, S.

Pub. info.:	Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.1073-1076, 2004. Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	449-452

43.

Conference Proceedings

43. Fabrication of Functionally Graded Thermoelectric Coatings by Plasma Spraying of Mechanically-Alloyed Composite Powders

Fukumoto, M. ; Tokimoto, Y. ; Mikawa, H. ; Tanaka, Y.

Pub. info.:	Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998. pp.742-747, 1999. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	308-311

44.

Conference Proceedings

44. Relationship between the Current Direction in the Inversion Layer and the Electrical Characteristics of Metal-Oxide-Semiconductor Field Effect Transistors on 3C-SiC

Ohshima, T. ; Lee, K.K. ; Ishida, Y. ; Kojima, K. ; Tanaka, Y. ; Takahashi, T. ; Yoshikawa, M. ; Okumura, H. ; Arai, K. ; Kamiya, T.

Pub. info.:	Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1405-1408, 2004. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	457-460

45.

Conference Proceedings

45. Flattening Problem of Thermal Sprayed Particles

Fukumoto, M. ; Tanaka, Y. ; Nishioka, E.

Pub. info.:	Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.1309-1312, 2004. Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	449-452

46.

Conference Proceedings

46. Homoepitaxial Growth of 4H-SiC Thin Film Below 1000oC by Microwave Plasma Chemical Vapor Deposition

Okamoto, M. ; Kosugi, R. ; Tanaka, Y. ; Takeuchi, D. ; Nakashima, S. ; Nishizawa, S. ; Fukuda, K. ; Okushi, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.299-302, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

47.

Conference Proceedings

47. Self-Cross-Linkable Polyepoxides

Tanaka, Y.

Pub. info.:	Epoxy resin chemistry : based on a symposium sponsored by the Division of Organic Coatings and Plastics at the 176th meeting of the American Chemical Society, Miami Beach, Florida, September 11-15, 1978. pp.197-, 1979. Washington. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	114

48.

Conference Proceedings

48. Mechanisms of phytochemical inhibition of carcinogenesis: elucidating the role of ｦﾃ-tocopherol in nutrition

Burnett, T.S. ; Tanaka, Y. ; Harwood, P.J. ; Cooney, R.V.

Pub. info.:	Fruits, vegetables, and teas. pp.45-58, 1998. Washington, DC. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	701

49.

Conference Proceedings

49. Superconductivity of ｦﾊ-(BEDT-TTF)2Cu[N(CN)2]Br: Isotope Effect Revisited

Tokumoto, M. ; Kinoshita, N. ; Tanaka, Y. ; Anzai, H.

Pub. info.:	Electrical, optical, and magnetic properties of organic solid-state materials IV : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.903-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	488

50.

Conference Proceedings

50. Measurement Techniques for Charging in Bulk of Insulating Materials Irradiated by Radioactive Rays

Tanaka, Y.

Pub. info.:	7th Spacecraft Charging Technology Conference : 2001: a spacecraft charging odyssey, ESTEC, Noordwijk, the Netherlands, 23-27 April 2001. pp.411-416, 2001. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	476

51.

Conference Proceedings

51. Electrical Properties of pn Diodes on 4H-SiC(000-1) C-Face and (11-20) Face

Tanaka, Y. ; Kojima, K. ; Suzuki, T. ; Hayashi, T. ; Fukuda, K. ; Yatsuo, T. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1065-1068, 2004. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	457-460

52.

Conference Proceedings

52. Fabrication of Mesa-Type pn Diodes without Forward Degradation on Ultra-High-Quality 6H-SiC Substrate

Tanaka, Y. ; Ohno, T. ; Oyanagi, N. ; Nishizawa, S. ; Suzuki, T. ; Fukuda, K. ; Yatsuo, T. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1009-1012, 2004. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	457-460

53.

Conference Proceedings

53. Tribological characteristics of solid lubricated bearings used in ADEOS-II TCM

Tanaka, Y. ; Haraguchi, M. ; Obara, S. ; Sasaki, A. ; Kawata, S. ; Suzuki, H.

Pub. info.:	9th European Space Mechanisms and Tribology Symposium, 19-21 September 2001, Liège, Belgium. pp.297-304, 2001. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	480

54.

Conference Proceedings

54. Electrical Activation of Ion-Implanted Nitrogen and Aluminum in 4H-SiC by Excimer Laser Annealing

Tanaka, Y. ; Tanoue, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.605-608, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	433-436

55.

Conference Proceedings

55. Low-Temperature Activation of the Ion-Implanted Dopants in 4H-SiC by Excimer Laser Annealing

Tanaka, Y. ; Tanoue, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.799-802, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

56.

Conference Proceedings

56. Homoepitaxial Growth of 4H-SiC Thin Film Below 1000oC by Microwave Plasma Chemical Vapor Deposition

Okamoto, Mitsuo ; Kosugi, R. ; Tanaka, Y. ; Takeuchi, D. ; Nakashima, S. ; Nishizawa, S. ; Fukuda, K. ; Okushi, H. ; Arai, K.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.299-302, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

57.

Conference Proceedings

57. Thin-film-based dispersion compensation technology and challenges (Invited Paper)

Jablonski, M. ; Tanaka, Y. ; Kikuchi, K.

Pub. info.:	Active and passive optical components for WDM communications II : 29 July-1 August 2002, Boston, USA. pp.264-278, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4870

58.

Technical Paper

58. Hydrogen Generation by Plasma Decomposition from Mixture of Organic Solution

Mizuno, T. ; Tanaka, Y.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.:	3rd

59.

Technical Paper

59. Toyota's New Six-Speed Automatic Transmission A761E for RWD Vehicles.

Nozaki, Y. ; Tanaka, Y. ; Tomomatsu, H. ; Tsukamoto, H. ; Hanji, F.

Pub. info.:	2004 SAE world congress : technical paper. 2004. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2004

60.

Technical Paper

60. Valve Train Dynamic Analysis and Validation.

Lin, Y. ; Ramachandra, P. ; Tanaka, Y. ; Tawata, K. ; Yano, Y.

Pub. info.:	2004 SAE world congress : technical paper. 2004. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2004

61.

Technical Paper

61. Development of Methane Oxidation Catalyst and Its Mechanism.

Hirasawa, Y. ; Tanaka, Y. ; Banno, Y. ; Nagata, M.

Pub. info.:	2005 SAE world congress : technical paper. 2005. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2005

62.

Technical Paper

62. Shift Control System Development (NAVI-AI-SHIFT) for 5 Speed Automatic Transmissions Using Information From the Vehicle's Navigation System.

Inagawa, T. ; Tomomatsu, H. ; Tanaka, Y. ; Shiiba, K. ; Shirai, H.

Pub. info.:	2002 SAE world congress : technical paper. 2002. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2002

63.

Technical Paper

63. Solution of Air Entrainment for Fluid Power Systems.

Suzuki, R. ; Tanaka, Y.

Pub. info.:	2002 SAE International Off-Highway Congress : technical paper. 2002. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2002

64.

Technical Paper

64. The Technology to Produce Thermoplastic Elastomer Based on Waste Rubber

Tanaka, Y. ; Watanabe, T. ; Okita, T. ; Matsushita, M. ; Okamoto, H. ; Fukumori, K. ; Suzuki, N. ; Suzuki, Y.

Pub. info.:	Sealing, Gaskets & Elastomers ; Cobo Center, Detroit, Michigan, March 3-6, 2003. pp.97-102, 2003. Society of Automotive Engineering, Inc.
Title of ser.:	SAE special publication
Ser. no.:	SP1762

65.

Technical Paper

65. Delamination Monitoring of Graphite/Epoxy Laminated Composite Plate with Electric Resistance Change Method

Todoroki, A. ; Tanaka, Y. ; Shimamura, Y.

Pub. info.:	A collection of technical papers : 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference : 10th AIAA/ASME/AHS Adaptive Structures Forum : 4th AIAA Non-Deterministic Approaches Forum : 3rd AIAA Gossamer Spacecraft Forum, Denver, Colorado, 22-25 April 2002. v. 4 pp.2698-2705, 2002. Reston, VA. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Ser. no.:	2002

66.

Technical Paper

66. Automatic Transmission Control System Developed for Toyota Mild Hybrid System (THS-M).

Tomomatsu, H. ; Tanaka, Y. ; Nakatani, K. ; Tadasu, T. ; Matsubara, T.

Pub. info.:	2002 SAE world congress : technical paper. 2002. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2002

67.

Technical Paper

67. Pre-filter Diesel Oxidation Catalyst Development for DOC-CSF System.

Banno, Y. ; Tanaka, Y. ; Hihara, T. ; Nagata, M.

Pub. info.:	2004 SAE world congress : technical paper. 2004. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2004

68.

Technical Paper

68. Analysis on Behaviors of Swirl Nozzle Spray and Slit Nozzle Spray in Relation to DI Gasoline Combustion.

Tanaka, Y. ; Takano, Sami, H. ; Sakai, K. ; Osumi, N.

Pub. info.:	2003 SAE world congress : technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

69.

Technical Paper

69. A New NOx Reduction Catalyst System for Diesel Engine with High Sulfur Tolerance.

Uekusa, T. ; Enoki, K. ; Fujita, T. ; Tanaka, Y. ; Shibuya, H.

Pub. info.:	2003 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

70.

Technical Paper

70. A New Transient NOx Direct Catalytic Decomposition on a Rh-Based Catalyst.

Nakatsuji, T. ; Ruotoistenmaki, J. ; Matsubara, M. ; Uekusa, T. ; Tanaka, Y.

Pub. info.:	2003 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

71.

Technical Paper

71. A Study on Design Factors of Gas Pedal Operation.

Horiue, M. ; Tanaka, Y.

Pub. info.:	2012 SAE world congress : technical paper. 2012. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2012

72.

Technical Paper

72. OCT Hydrogen Generation System

Tanaka, Y.

Pub. info.:	A collection of technical papers : 1st International Energy Conversion Engineering Conference, Portsmouth, Virginia, 17-21 August 2003. pp.606-609, 2003. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper

73.

Technical Paper

73. Development of Nitrogen Components Analyzer Utilizing Quantum Cascade Laser.

Hara, K. ; Nakatani, S. ; Rahman, M. ; Nakamura, H. ; Tanaka, Y.

Pub. info.:	2009 SAE Powertrains, Fuels & Lubricants Meeting : technical paper. 2009. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2009

74.

Technical Paper

74. A Study of a Compression Ratio Control Mechanism for a Multiple-Link Variable Compression Ratio Engine.

Tanaka, Y. ; Hiyoshi, R. ; Takemura, S. ; Ikeda, Y. ; Sugawara, M.

Pub. info.:	14th Asia Pacific Automotive Engineering Conference : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

75.

Technical Paper

75. Compact and Long-Stroke Multiple-Link VCR Engine Mechanism.

Tomita, M. ; Aoyama, S. ; Ushijima, K. ; Tanaka, Y. ; Takahashi, N.

Pub. info.:	2007 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

76.

Technical Paper

76. Oxygen Partial Pressure over Precious Metals and Its Effect on HC Oxidation Performance.

Tanaka, Y. ; Nagata, M.

Pub. info.:	2007 SAE world congress : technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

77.

Technical Paper

77. Occupant Responses in Child Restraint Systems Subjected to Full-Car Side Impact Tests.

Yonezawa, H. ; Tanaka, Y. ; Hosokawa, N. ; Matsui, Y. ; Mizuno, K. ; Yoshida, R.

Pub. info.:	2010 SAE world congress : technical paper. 2010. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2010

78.

Technical Paper

78. Improvement of Wear Resistance of Fuel Pump for High Alcohol Content Fuel.

Uehara, T. ; Miyake, K. ; Tanaka, Y. ; Tsuda, Y.

Pub. info.:	2010 Small Engine Technology Conference and Exhibition : SAE technical paper. 2010. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2010

79.

Technical Paper

79. Residual Gas Fraction Measurement inside Engine Cylinder using Infrared Absorption Method with Spark-Plug Sensor.

Kawahara, N. ; Tomita, E. ; Tanaka, Y.

Pub. info.:	2007 International Fuels and Lubricants Meeting : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

80.

Technical Paper

80. Modeling of Phosphorus Poisoning Phenomena over Diesel Oxidation Catalysts.

Nagata, M. ; Tanaka, Y.

Pub. info.:	2010 SAE world congress : technical paper. 2010. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2010

81.

Technical Paper

81. Car-to-Car Side Impact Tests in Various Conditions.

Tanaka, Y. ; Yonezawa, H. ; Matsui, Y. ; Hosokawa, N. ; Mizuno, K.

Pub. info.:	2010 SAE world congress : technical paper. 2010. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2010

82.

Technical Paper

82. Emission Testing of N2O (Bag Sampling) from Diverse Vehicles by Laser Spectroscopic Motor Exhaust Gas Analyzer.

Rahman, M. ; Tanaka, Y. ; Nakatani, S. ; Hara, K.

Pub. info.:	2011 SAE world congress : technical paper. 2011. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2011

83.

Technical Paper

83. Development of Display Information and Telematics Systems for a Reliable and Attractive Electric Vehicle.

Yoshizawa, S ; Tanaka, Y.

Pub. info.:	1st International Electric Vehicle Technology Conference 2011 (EVTeC'11) : SAE technical paper. 2011. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2011

84.

Technical Paper

84. The Technology to Produce Thermoplastic Elastomer Based on Waste Rubber.

Tanaka, Y. ; Watanabe, T. ; Okita, T. ; Matsushita, M. ; Okamoto, H. ; Fukumori, K. ; Suzuki, N. ; Suzuki, Y.

Pub. info.:	2003 SAE world congress : technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

85.

Technical Paper

85. Rearview Camera Based Parking Assist System with Voice Guidance.

Hiramatsu, S. ; Hibi, A. ; Tanaka, Y. ; Kakinami, T. ; Iwata, Y. ; Nakamura, M.

Pub. info.:	2002 SAE world congress : technical paper. 2002. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2002

86.

Technical Paper

86. Effective Catalyst Layer Study by Computer Calculation.

Hihara, T. ; Tanaka, Y. ; Banno, Y. ; Nagata, M.

Pub. info.:	2005 SAE world congress : technical paper. 2005. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2005

87.

Technical Paper

87. The Effectiveness of Curtain Side Air Bags in Side Impact Crashes.

Tanaka, Y. ; Yonezawa, H. ; Hosokawa, N. ; Matsui, Y.

Pub. info.:	2011 SAE world congress : technical paper. 2011. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2011

88.

Technical Paper

88. Study of DOC+CSF Optimization.

Kanno, Y. ; Tanaka, Y. ; Banno, Y. ; Nagata, M.

Pub. info.:	2006 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper. 2006. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2006

89.

Conference Proceedings

89. Current status of Mo-Si multilayer formation in ASET for low-defect-density mask blanks for EUV lithography [6349-122]

Hiruma, K. ; Tanaka, Y. ; Miyagaki, S. ; Yamanashi, H. ; Nishiyama, I.

Pub. info.:	Photomask Technology 2006. pp.634937-634937, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

90.

Conference Proceedings

90. Evaluation of defect repair of EUV mask absorber layer [5853-74]

Abe, T. ; Amano, T. ; Mohri, H. ; Hayashi, N. ; Tanaka, Y. ; Kumasaka, F. ; Nishiyama, I.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.866-873, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

91.

Conference Proceedings

91. Fiber optic remote sensor based on laser powering and liquid-crystal-based optical modulator [5855-244]

Tanaka, Y. ; Sugano, S. ; Nakagawa, M. ; Shioda, T. ; Kurokawa, T. ; Fukuoka, T. ; Ueta, K.

Pub. info.:	17th International Conference on Optical Fibre Sensors. pp.992-995, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5855

92.

Conference Proceedings

92. Evaluation of resolution and LER in the resist patterns replicated by EUV micro-exposure tools [6151-07]

Kikuchi, Y. ; Tanaka, Y. ; Oizumi, H. ; Kumasaka, F. ; Goo, D. ; Nishiyama, I.

Pub. info.:	Emerging Lithographic Technologies X. pp.615107-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6151

93.

Conference Proceedings

93. Ultra-fast and ultra-small photonic crystal/quantum dot all-optical switch for future photonic networks (Invited Paper) [5926-11]

Nakamura, H. ; Sugimoto, Y. ; Kanamoto, K. ; Ikeda, N. ; Tanaka, Y. ; Nakamura, Y. ; Ohkouchi, S. ; Inoue, K. ; Ishikawa, H. ; Asakawa, K.

Pub. info.:	Tuning the Optical Response of Photonic Bandgap Structures II. pp.59260B-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5926

94.

Conference Proceedings

94. Phase defect observation using an EUV microscope [6151-46]

Hamamoto, K. ; Tanaka, Y. ; Yoshizumi, T. ; Fukushima, Y. ; Shiotani, H. ; Sakaya, N. ; Hosoya, M ; Shoki, T ; Watanabe, T ; Kinoshita, H

Pub. info.:	Emerging Lithographic Technologies X. pp.615119-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6151

95.

Conference Proceedings

95. Photomask quality assessment strategy at 90-nm technology node with aerial image simulation

Nagamura, Y. ; Hosono, K. ; Pang, L. ; Chan, K.K. ; Tanaka, Y.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.476-483, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

96.

Conference Proceedings

96. Advanced FIB mask repair technology for 100-nm/ArF lithography: II

Hagiwara, R. ; Yasaka, A. ; Aita, K. ; Takaoka, O. ; Koyama, Y. ; Kozakai, T. ; Doi, T. ; Muramatsu, M. ; Suzuki, K. ; Sugiyama, Y. ; Matsuda, O. ; Okabe, M. ; Shinohara, S. ; Hasuda, M. ; Adachi, T. ; Morikawa, Y. ; Nishiguchi, M. ; Sato, Y. ; Hayashi, N. ; Ozawa, T. ; Tanaka, Y. ; Yoshioka, N.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.510-519, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

97.

Conference Proceedings

97. Advanced NLD mask dry etching system for 90-nm node technology

Harashima, N. ; Sasaki, T. ; Kuwahara, K. ; Hayashi, T. ; Tanaka, Y. ; Yoshioka, N. ; Hara, M. ; Ohkubo, Y.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.275-280, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

98.

Conference Proceedings

98. Improvement of NLD mask dry etching system for 100-nm-node technology

Tanaka, Y. ; Yoshioka, N. ; Harashima, N. ; Sasaki, T. ; Kuwahara, K. ; Hayashi, T. ; Hara, M. ; Ohkubo, Y.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part One pp.619-625, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

99.

Conference Proceedings

99. Advanced photomask repair technology for 65-nm lithography: II

Itou, Y. ; Tanaka, Y. ; Yoshioka, N. ; Sugiyama, Y. ; Hagiwara, R. ; Takahashi, H. ; Takaoka, O. ; Kozakai, T. ; Matsuda, O. ; Suzuki, K. ; Okabe, M. ; Kikuchi, S. ; Uemoto, A. ; Yasaka, A. ; Adachi, T. ; Nishida, N. ; Ozawa, T.

Pub. info.:	24th Annual BACUS Symposium on Photomask Technology. pp.1132-1143, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5567

100.

Conference Proceedings

100. Advanced photomask repair technology for 65 nm lithography (4) [5992-170]

Itou, Y. ; Tanaka, Y. ; Suga, O. ; Sugiyama, Y. ; Hagiwara, R. ; Takahashi, H. ; Takaoka, O. ; Kozakai, T. ; Matsuda, O. ; Suzuki, K. ; Okabe, M. ; Kikuchi, S. ; Uemoto, A. ; Yasaka, A. ; Adachi, T.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59924Y-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

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