1.

Conference Proceedings
Conference Proceedings
1. Variation in the Silicon Oxynitridation Process Along a Furnace Length
Dang, S.S. ; Takoudis, C.G.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.143-154,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6
2.

Conference Proceedings
Conference Proceedings
2. On the Silicon Suboxide Layer Above an Atomically Abrupt Silicon Oxide/Si(100) Interface in N2O Furnace Oxidation
Dang, S.S. ; Duscher, G. ; Browning, N.D. ; Pennycook, S. ; Takoudis, C.G.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.240-249,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6