1.

Conference Proceedings
Conference Proceedings
1. CRYSTAL QUALITY AND SURFACE MORPHOLOGY IMPROVEMENT OF MOVPE-GROWN GaAs-ON-Si USING TERTIARYBUTYLARSINE
Miyagaki, S. ; Ohkubo, S. ; Takai, K. ; Takagi, N. ; Kimura, M. ; Kikuchi, Y. ; Eshita, T. ; Takasaki, K.
Pub. info.: Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.345-350,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 281
2.

Conference Proceedings
Conference Proceedings
2. MOVPE GROWTH OF GaAs ON Si USING TERTIARYBUTYLARSINE
Miyagaki, S. ; Ohkubo, S. ; Takai, K. ; Takagi, N. ; Kimura, M. ; Kikuchi, Y. ; Eshita, T. ; Takasaki, K.
Pub. info.: Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.209-214,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 263
3.

Conference Proceedings
Conference Proceedings
3. Fe REMOVAL EFFECTS OF SILICON CHLORIDES (SiCl R) DURING UV/Cl2 DRY CLEANING
Sugino, R. ; Okui, Y. ; Shigeno, M. ; Ohkubo, S. ; Takasaki, K. ; Ito, T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.291-298,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
4.

Conference Proceedings
Conference Proceedings
4. Ultrathin Oxides by UV/Ozone Pretreatment Cleaning and Ozone Oxidation
Nakanishi, T. ; Ohkubo, S. ; Tamura, Y. ; Sugino, R. ; Awaji, N. ; Takasaki, K.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.316-328,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1