1.

Conference Proceedings
Conference Proceedings
1. Development of “Si-Vapor Etching” and “Si Vapor Ambient Anneal” in TaC/Ta Composite Materials
N. Yabuki ; S. Torimi ; S. Nogami ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.719-722,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
2.

Conference Proceedings
Conference Proceedings
2. Low Energy Electron Channeling Contrast Imaging from 4H-SiC Surface by SEM and its Comparison with CDIC-OM and PL Imaging
K. Ashida ; T. Aiso ; M. Okamoto ; H. Seki ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.193-196,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
3.

Conference Proceedings
Conference Proceedings
3. Improving Mechanical Strength and Surface Uniformity to Prepare High Quality Thinned 4H-SiC Epitaxial Wafer Using Si-Vapor Etching Technology
S. Torimi ; K. Ashida ; N. Yabuki ; M. Shinohara ; T. Sakaguchi ; Y. Teramoto ; S. Nogami ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.375-378,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897