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Conference Proceedings

1. CRACK GROWTH RESISTANCE OF CERAMIC COMPOSITE

Hayashi, Seijiro ; Baba, H. ; Suzuki, A.

Pub. info.:	Silicon nitride ceramics : scientific and technological advances : symposium held November 30-December 3,1992, Boston, Massachusetts, U.S.A.. pp.481-486, 1993. Pittsburgh. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	287

Conference Proceedings

2. Interdiffusion Behavior of Electroplated platinum-Iridium Alloys on Nickel-Base Single Crystal Superalloy TMS-82+

Wu, Y.N. ; Suzuki, A. ; Murakami, H. ; Kuroda, S.

Pub. info.:	High-temperature oxidation and corrosion 2005 : proceedings of the International Symposium on High-Temperature Oxidation and Corrosion 2005 , Nara, Japan, 30th November - 2nd December 2005. pp.293-300, 2006. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	522-523

Conference Proceedings

3. Atomic Mechanisms of Grain Boundary Motion

Suzuki, A. ; Mishin, Y.

Pub. info.:	New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan. pp.157-162, 2005. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	502

Conference Proceedings

4. The Behaviors of MCFCs Using Li/K and Li/Na as the Electrolyte at High Pressure

Yosikawa, M. ; Mugikura, Y. ; Watanabe, T. ; Ota, T. ; Suzuki, A.

Pub. info.:	Proceedings of the eleventh International Symposium on Molton [i.e. Molten] Salts XI. pp.468-474, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-11

Conference Proceedings

5. DISSOLUTION AND DEPOSITION OF NICKEL OXIDE CATHODE IN MOLTEN CARBONATE FUEL CELL

Kasai, H. ; Suzuki, A.

Pub. info.:	Proceedings of the Third International Symposium on Carbonate Fuel Cell Technology. pp.240-251, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-3

Conference Proceedings

6. The Improvement of Cell Components for a Long Life MCFC

Suzuki, A. ; Oota, T. ; Masuda, Y. ; Shoji, C. ; Yuasa, K. ; Matsuo, T.

Pub. info.:	Proceedings of the Fourth International Symposium on Carbonate Fuel Cell Technology. pp.40-50, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-4

Conference Proceedings

7. Results of the Precise Orbit Determination Experiment with ADEOS-II

Nakamura, S. ; Uchimura, T. ; Katagiri, S. ; Suzuki, A. ; Sawabe, M. ; Yamamoto, Y.

Pub. info.:	Proceedings of the 18th International Symposium on Space Flight Dynamics : 11-15 October 2004, Munich, Germany. pp.163-168, 2004. Noordwijk, the Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	548

Conference Proceedings

8. CONTROL OF PHOTO-INDUCED DEGRADATION IN a-Si:H PREPARED FROM Xe-DILUTED SILANE

Mashima, S. ; Hasezaki, K. ; Suzuki, A. ; McElheny P.J. ; Matsuda, A.

Pub. info.:	Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.3-14, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	219

Conference Proceedings

9. Development of Electrolyte Plate for Molten Carbonate Fuel Cell

Shoji, C. ; Matsuo, T. ; Suzuki, A. ; Yamamasu, Y.

Pub. info.:	Materials for electrochemical energy storage and conversion II--batteries, capacitors, and fuel cells : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.211-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	496

10.

Conference Proceedings

10. Binding Force Between Clay Mineral and Water Molecules by Semiempirical Molecular Orbital Calculation

Nagasaki, S. ; Umemura, Y. ; Todoriki, M. ; Tanaka, S. ; Suzuki, A.

Pub. info.:	Scientific basis for nuclear waste management XXI : symposium held September 28-October 3, 1997, Davos, Switzerland. pp.423-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	506

11.

Conference Proceedings

11. Excimer pulsed laser ablated molecular beam evaporation for the deposition of binary skutterudites

Durand, H-A. ; Suzuki, A. ; Nishimoto, K. ; Ito, K. ; Kataoka, I.

Pub. info.:	New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.177-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	616

12.

Conference Proceedings

12. Uncertainties in Nuclide Releases for a High-Level Waste Repository Backfill with Smectite Illitization

Hatano, Y. ; Hatano, N. ; Suzuki, A.

Pub. info.:	Scientific basis for nuclear waste management XIX : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.921-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	412

13.

Conference Proceedings

13. EFFECTS OF SMECTITE ILLITIZATION ON TRANSPORT OF ACTINIDES THROUGH ENGINEERED BARRIERS OF HLW REPOSITORIES

Ahn, Joonhong ; Nagasaki, S. ; Tanaka, S. ; Suzuki, A.

Pub. info.:	Scientific basis for nuclear waste management XVIII : symposium held October 23-27, 1994, Kyoto, Japan. pp.231-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	353

14.

Conference Proceedings

14. Hydrogenation and Magnetic Properties of Pd/Co Multilayers

Suzuki, A. ; Kyuno, K. ; Akiba, E. ; Manago, T. ; Miyajima, H. ; Yamamoto, R.

Pub. info.:	Interfacial engineering for optimized properties : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.391-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	458

15.

Conference Proceedings

15. Precise in-situ transmission measurement system at 157 nm

Takeuchi, S. ; Kishikawa, Y. ; Yoshii, M. ; Suzuki, A.

Pub. info.:	Optical diagnostic methods for inorganic materials III : 6-7 August 2003, San Diego, California, USA. pp.46-53, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5192

16.

Conference Proceedings

16. Fatigue Characteristics of Dental Cast Titanium Alloy, Ti-6Al-7Nb, Conducted with Thermochemical Heat Processing

Akahori, T. ; Niinomi, M. ; Suzuki, A.

Pub. info.:	THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.3073-3078, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	426-432

17.

Conference Proceedings

17. Polarization-maintaining photonic crystal fibers (Invited Pape)

Suzuki, A. ; Tanaka, M. ; Yamaguchi, S. ; Fujita, M. ; Yamamoto, T. ; Kubota, H. ; Kawanishi, S.

Pub. info.:	Active and passive optical components for WDM communications III : 8-11 September, 2003, Orlando, Florida, USA. pp.366-374, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5246

18.

Conference Proceedings

18. On the Generation of Basic Properties of Supported Nitrates and Carbonates of Group 1 and Group 2 Elements

Yamaguchi, T. ; Wang, Y. ; Komatsu, M. ; Suzuki, A. ; Ookawa, M.

Pub. info.:	Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002. pp.211-214, 2003. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	145

19.

Conference Proceedings

19. Electrodeposition of Cu from Cu(1) Ions in Ambient Temperature Molten Salt Electrolyes

Koura, N. ; Suzuki, A. ; Ito, S.

Pub. info.:	Proceedings of the International Symposium on Molten Salt Chemistry and Technology 1993. pp.70-80, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-9

20.

Conference Proceedings

20. Development of a high-speed CMOS drum camera with multiple focal depths

Komatsu, M. ; Saito, T. ; Sato, E. ; Takayama, K. ; Hukui, T. ; Ohkouchi, T. ; Ishikawa, E. ; Suzuki, A. ; Konishi, N. ; Mitsui, K. ; Shibasaki, S. ; Shibasaki, K.

Pub. info.:	26th International Congress on High-Speed Photography and Photonics : 20-24 September 2004, Alexandria, Virginia, USA. pp.873-880, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5580

21.

Conference Proceedings

21. Recent progress of EUV wavefront metrology in EUVA

Hasegawa, M. ; Ouchi, C. ; Hasegawa, T. ; Kato, S. ; Ohkubo, A. ; Suzuki, A. ; Sugisaki, K. ; Okada, M. ; Otaki, K. ; Murakami, K. ; Saito, J. ; Niibe, M. ; Takeda, M.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.27-36, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5533

22.

Conference Proceedings

22. Optimization of Mg-Zn-Al-Ca-La Alloys for the Improvement of Casting Properties and Creep Resistance

Anthony, A. I. ; Suzuki, A. ; Kamado, S. ; Kojima, Y.

Pub. info.:	Magnesium-science, technology and applications : proceedings of the International Conference on Magnesium-Science, Technology and Applications September 20-24, 2004, Beijing, China. pp.805-810, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	488-489

23.

Conference Proceedings

23. Surface Modification of Magnesium Alloys by Laser Alloying Using Si Powder

Murayama, K. ; Suzuki, A. ; Takagi, T. ; Kamado, S. ; Kojima, Y. ; Hiraga, H.

Pub. info.:	Magnesium alloys 2003 : proceedings of the Second Osaka International Conference on Platform Science and Technology for Advanced Magnesium Alloys 2003, Osaka, Japan, 26-30, January, 2003. pp.969-974, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	419-422

24.

Conference Proceedings

24. Development of Heat Resistant Mg-Zn-Al-Ca-RE Diecasting Alloys

Gokan, Y. ; Suzuki, A. ; Nozawa, S. ; Anyanwu, I.A. ; Kamado, S. ; Kojima, Y. ; Takeda, S. ; Ishida, T.

Pub. info.:	Magnesium alloys 2003 : proceedings of the Second Osaka International Conference on Platform Science and Technology for Advanced Magnesium Alloys 2003, Osaka, Japan, 26-30, January, 2003. pp.451-458, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	419-422

25.

Conference Proceedings

25. Fatigue Performance of Low Rigidity Titanium Alloy for Biomedical Applications

Akahori, T. ; Niinomi, M. ; Fukui, H. ; Suzuki, A.

Pub. info.:	Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.1265-1268, 2004. Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	449-452

26.

Conference Proceedings

26. Temperature Dependence of DC Characteristics in AlN/GaN Metal Insulator Semiconductor Field Effect Transistor

Ide, T. ; Shimizu, M. ; Suzuki, A. ; Shen, X.-Q. ; Okumura, H. ; Nemoto, T.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1519-1522, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

27.

Conference Proceedings

27. Surface Morphology of GaN Epilayer with SixN1-x Buffer Layer Grown by Ammonia-source MBE

Shimizu, M. ; Ohkita, H. ; Suzuki, A. ; Okumura, H.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1465-1468, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

28.

Conference Proceedings

28. Growth and Characterization of GaGdN and AlGdN on SiC by RF-MBE

Teraguchi, N. ; Suzuki, A. ; Nanishi, Y.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1477-1480, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

29.

Conference Proceedings

29. Effect of Microstructures on Mechanical Properties of Heat Resistant Titanium Alloys at Elevated Temperatures

Suzuki, A. ; Noda, T. ; Okabe, M.

Pub. info.:	THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.667-672, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	426-432

30.

Conference Proceedings

30. Advanced Thin Silicon Space Solar Cells

Hisamatsu, T. ; Washio, H. ; Saga, T. ; Matsutani, T. ; Suzuki, A. ; Kawasaki, O. ; Yamamoto, Y. ; Matsuda, S.

Pub. info.:	Proceedings of the European Space Power Conference, Poitiers, France, 4-8 September 1995. pp.371-378, 1995. Noordwijk, Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	369

31.

Conference Proceedings

31. Growth and Characterization of GaGdN and AlGdN on SiC by RF-MBE

Teraguchi, N. ; Suzuki, A. ; Nanishi, Y.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1477-1480, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

32.

Conference Proceedings

32. Temperature Dependence of DC Characteristics in AlN/GaN Metal Insulator Semiconductor Field Effect Transistor

Ide, T. ; Shimizu, M. ; Suzuki, A. ; Shen, X.-Q. ; Okumura, H. ; Nemoto, T.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1519-1522, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

33.

Conference Proceedings

33. Surface Morphology of GaN Epilayer with SixN1-x Buffer Layer Grown by Ammonia-source MBE

Shimizu, M. ; Ohkita, H. ; Suzuki, A. ; Okumura, H.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1465-1468, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

34.

Technical Paper

34. Development of Urea-SCR System for Commercial Vehicle - Basic Characteristics and Improvement of NOx Conversion at Low Load Operation -

Saito, S. ; Shinozuka, R. ; Suzuki, A. ; Jyoutaki, H. ; Takeda, Y.

Pub. info.:	2003 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

35.

Technical Paper

35. Study on the Fan Noise Reduction for Automotive Radiator Cooling Fans.

Suzuki, A. ; Soya, A.

Pub. info.:	2005 SAE world congress : technical paper. 2005. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2005

36.

Technical Paper

36. Effect of Coexistent Additives on the Friction Characteristics and Tribofilm Formation of Zinc Dialkyldithiophosphate.

Aoki, S. ; Masuko, M. ; Suzuki, A.

Pub. info.:	2007 International Fuels and Lubricants Meeting : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

37.

Technical Paper

37. Electro-Hydroulic Control System for AISIN AW New 6-Speed Automatic Transmission.

Tsutsui, H. ; Hisano, T. ; Suzuki, A. ; Hijikata, M. ; Taguchi, M.

Pub. info.:	2004 SAE world congress : technical paper. 2004. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2004

38.

Technical Paper

38. A Molecular Dynamics Analysis of the Traction Fluids.

Washizu, H. ; Sanda, S. ; Hyodo, S. ; Ohmori, T. ; Nishino, N. ; Suzuki, A.

Pub. info.:	2007 SAE world congress : technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

39.

Technical Paper

39. Permanent Mold Casting and Creep Behavior of Mg-4 Al-4: (Ca, Ce, La, Sr) Alloys.

Saddock, N.D. ; Suzuki, A. ; Terbush, J.R. ; Jones, J.W. ; Pollock, T.M.

Pub. info.:	2007 SAE world congress : technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

40.

Technical Paper

40. The Mg-Al-Ca Alloy System for Structural Applications at Elevated Temperatures.

Suzuki, A. ; Saddock, N.D. ; TerBush, J.R. ; Wayne Jones, J. ; Pollock, T.M.

Pub. info.:	2007 SAE world congress : technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

41.

Technical Paper

41. Multiscale Theoretical Study of Sintering Dynamics of Pt for Automotive Catalyst.

Suzuki, A. ; Sato, R. ; Nakamura, K. ; Okushi, K. ; Tsuboi, H.

Pub. info.:	2009 SAE Powertrains, Fuels & Lubricants Meeting : technical paper. 2009. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2009

42.

Conference Proceedings

42. New approach for realizing k1=0.3 optical lithography

Hasegawa, M. ; Suzuki, A. ; Saito, K. ; Yoshii, M.

Pub. info.:	Photomask and X-Ray Mask Technology VI. pp.278-289, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3748

43.

Conference Proceedings

43. Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Murakami, K. ; Saito, J. ; Ota, K. ; Kondo, H. ; Ishii, M. ; Kawakami, J. ; Oshino, T. ; Sugisaki, K. ; Zhu, Y. ; Hasegawa, M. ; Sekine, Y. ; Takeuchi, S. ; Ouchi, C. ; Kakuchi, O. ; Watanabe, Y. ; Hasegawa, T. ; Hara, S. ; Suzuki, A.

Pub. info.:	Emerging Lithographic Technologies VII. 1 pp.257-264, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5037

44.

Conference Proceedings

44. Rewritable optical recording In-Zn oxide films grown by pulsed laser deposition method

Aoki, T. ; Suzuki, A. ; Matsushita, T. ; Akizuki, M. ; Okuda, M.

Pub. info.:	Sixth International Symposium on Optical Storage (ISOS 2002). pp.154-159, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5060

45.

Conference Proceedings

45. Challenging the limit of single mask exposure

Yamazoe, K. ; Hasegawa, M. ; Saitoh, K. ; Suzuki, A.

Pub. info.:	Optical Microlithography XV. Part Two pp.1601-1612, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

46.

Conference Proceedings

46. New resolution enhancement method realizing the limit of single mask exposure

Yamazoe, K. ; Hasegawa, M. ; Saitoh, K. ; Suzuki, A.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology IX. pp.471-482, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4754

47.

Conference Proceedings

47. ArF immersion lithography: critical optical issues

Honda, T. ; Kishikawa, Y. ; Tokita, T. ; Ohsawa, H. ; Kawashima, M. ; Ohkubo, A. ; Yoshii, M. ; Uda, K. ; Suzuki, A.

Pub. info.:	Optical Microlithography XVII. pp.319-328, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

48.

Conference Proceedings

48. EUV wavefront metrology system in EUVA

Hasegawa, T. ; Ouchi, C. ; Hasegawa, M. ; Kato, S. ; Suzuki, A. ; Sugisaki, K. ; Murakami, K. ; Saito, J. ; Niibe, M.

Pub. info.:	Emerging Lithographic Technologies VIII. pp.797-807, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5374

49.

Conference Proceedings

49. Lateral shearing interferometer for EUVL: theoretical analysis and experiment

Zhu, Y. ; Sugisaki, K. ; Ouchi, C. ; Hasegawa, M. ; Niibe, M. ; Suzuki, A. ; Murakami, K.

Pub. info.:	Emerging Lithographic Technologies VIII. pp.824-832, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5374

50.

Conference Proceedings

50. Evaluation of contamination deposition on pinholes used in EUV at-wavelength PDI

Sugisaki, K. ; Hasegawa, M. ; Kato, S. ; Ouchi, C. ; Saito, J. ; Niibe, M. ; Suzuki, A. ; Murakami, K.

Pub. info.:	Emerging Lithographic Technologies VIII. pp.702-709, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5374

51.

Conference Proceedings

51. Catadioptric projection optical system for flat panel exposure tool [6342-74]

Kohno, M. ; Fukami, K. ; Yoshioka, H. ; Watanabe, S. ; Suzuki, A.

Pub. info.:	International Optical Design Conference 2006. pp.63420Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6342

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