Wieczorek, Karsten ; Horstmann, Manfred ; Engelmann, Hans-Jtrgen ; Dittmar, Kornelia ; Blum, Werner ; Sultan, Akif ; Besser, Paul R. ; Frenkel, Austin
Pub. info.:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C5.1-, 2001. Warrendale, PA. Materials Research Society