Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.195-206, 1992. Pittsburgh, Pa.. Materials Research Society
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993. pp.163-171, 1993. Pennington, NJ. Electrochemical Society
Sugino, R. ; Tada, Y. ; Ito, T. ; Okui, Y. ; Sakuma, J.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.328-335, 1997. Pennington, NJ. Electrochemical Society
Sugino, R. ; Okui, Y. ; Shigeno, M. ; Ohkubo, S. ; Takasaki, K. ; Ito, T.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.291-298, 1997. Pennington, NJ. Electrochemical Society
Nakanishi, T. ; Ohkubo, S. ; Tamura, Y. ; Sugino, R. ; Awaji, N. ; Takasaki, K.
Pub. info.:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.316-328, 1996. Pennington, NJ. Electrochemical Society
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