Kalinowski, I.J. ; Bourlot, C. ; Marfoure, A. ; Louveau, O. ; Li, S. ; Su, J. ; Hills, G.W. ; Louis, D.
Pub. info.:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.216-223, 2003. Pennington, N.J.. Electrochemical Society
Li, S. ; Ostrowski, K. ; Kalinovski, I.J. ; Su, J. ; Hills, G.W.
Pub. info.:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.224-231, 2003. Pennington, N.J.. Electrochemical Society