1.

Conference Proceedings
Conference Proceedings
1. CD analysis of advanced photolithography and its impact on critical design structures [6156-12]
Romero, K. A. ; Seltmann, R. ; Burbach, G. ; Stephan, R. ; Paufler, J. ; Greenlaw, D.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. ACLV-analysis in production and its impact on product performance
Seltmann, R. ; Stephan, R. ; Mazur, M. ; Spence, C. ; Fontaine, B.L. ; Stankowski, D. ; Poock, A. ; Grundke, W.
Pub. info.: Optical Microlithography XVI.  Part One  pp.530-540,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040