Ferrieu, F. ; Stehle, J. L. ; Bernoux, F. ; Thomas, O.
Pub. info.:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.403-410, 1988. Pittsburgh, Pa.. Materials Research Society
Stehle, J. L. ; Thomas, O. T. ; Piel, J. P. ; Evrard, P. ; Lecat, J. H. ; Hammond, L. C.
Pub. info.:
Polymer based molecular composites : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.. pp.349-354, 1990. Pittsburgh, Pa.. Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.369-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.. pp.419-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.515-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Boher, P. ; Stehle, M. ; Godard, B. ; Stehle, J. L.
Pub. info.:
Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.417-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Boher, P. ; Stehle, M. ; Stehle, J. L. ; Fogarassy, E. ; Grob, J. J. ; Grob, A. ; Muller, D.
Pub. info.:
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.959-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Sun, L. ; Defranoux, C. ; Stehle, J. L. ; Boher, P. ; Evrard, P. ; Bellandi, E. ; Bender, H.
Pub. info.:
Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.95-102, 2004. Warrendale, Pa.. Materials Research Society
Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.399-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.1025-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.615233-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Stehle, J. L. ; Piel, J. P ; Campillo, J. ; Zahorski, D. ; Giovannini, H.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61522Z-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering