Stehle, J. L. ; Thomas, O. T. ; Piel, J. P. ; Evrard, P. ; Lecat, J. H. ; Hammond, L. C.
Pub. info.:
Polymer based molecular composites : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.. pp.349-354, 1990. Pittsburgh, Pa.. Materials Research Society
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.615233-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering