1.

Conference Proceedings
Conference Proceedings
1. Determination of complex index of immersion liquids at 193nm [6154-172]
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.: Optical Microlithography XIX.  pp.61544G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. New measuring technique of complex index of immersion liquids [6152-120]
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615233-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152