1.

Conference Proceedings
Conference Proceedings
1. Reproducibility data on SUMMiT
Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.102-112,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators
Smith,J.H. ; Montague,S. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.64-73,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639
3.

Conference Proceedings
Conference Proceedings
3. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.306-314,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
4.

Conference Proceedings
Conference Proceedings
4. Integrated mold/surface-micromachining process
Barron,C.C. ; Fleming,J.G. ; Montague,S. ; Sniegowski,J.J. ; Hetherington,D.L.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.30-35,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722