1.

Conference Proceedings
Conference Proceedings
1. Relevance of TCAD to process-aware design(Invited Paper)
Singh, V.K. ; Garcia-Colevatti, J.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.405-410,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Ultra- Purification of Chalcogen for Preparation of Bi2(TeSe)3 and (HgCd)Te
Prasad, Ganga ; Gandotra, V.K. ; Padmavati, M.V.G. ; Raina, Alka ; Singh, V.K. ; Sharma, R.K. ; Sharma, B.B. ; Kumar, Sunil Jai ; Reddy, M.R.P.
Pub. info.: Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001).  VOL-2  pp.1155-1158,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4746
3.

Conference Proceedings
Conference Proceedings
3. Lithography strategy for 65-nm node (Invited Paper)
Borodovsky, Y.A. ; Schenker, R.E. ; Allen, G.A. ; Tejnil, E. ; Hwang, D.H. ; Lo, F.-C. ; Singh, V.K. ; Gleason, R.E. ; Brandenburg, J.E. ; Bigwood, R.M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.1-14,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
4.

Conference Proceedings
Conference Proceedings
4. Proximity correction and k1 performance for resists with nonoptical patterning response
Fryer, D.S. ; Singh, V.K. ; Phung, T.N. ; Liu, P.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.379-383,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376