1.

Conference Proceedings
Conference Proceedings
1. 0.33-k1 ArF lithography for 100-nm DRAM
Bok, C.K. ; Kim, S.-K. ; Kim, H.-B. ; Oh, J.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.810-821,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings
Conference Proceedings
2. Printing 100-nm and sub-100-nm DRAM full-chip patterns with crosspole illumination in 0.63-NA ArF lithography
Kim, S.-K. ; Bok, C.-K. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1504-1512,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691