1.

Conference Proceedings

Conference Proceedings
Maekawa, S. ; Takashima, K. ; Shimojo, M. ; Higo, Y. ; Swain, M. V.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.247-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
2.

Conference Proceedings

Conference Proceedings
Ichikawa, Y. ; Maekawa, S. ; Takashima, K. ; Shimojo, M. ; Higo, Y. ; Swain, M. V.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.273-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605