Maekawa, S. ; Takashima, K. ; Shimojo, M. ; Higo, Y. ; Swain, M. V.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.247-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Ichikawa, Y. ; Maekawa, S. ; Takashima, K. ; Shimojo, M. ; Higo, Y. ; Swain, M. V.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.273-, 2000. Warrendale, Pa.. MRS-Materials Research Society