1.

Conference Proceedings
Conference Proceedings
1. Atomic-Layer Adsorption of P on Si(l00) by Using Ultraclean LPCVD
Shimamune, Y. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.58-62,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23
2.

Conference Proceedings
Conference Proceedings
2. Determination of Diffusivities of Si Self-Diffusion and Si Self-Interstitials using Isotopically Enriched Single- or Multi-30Si Epitaxial Layers
Matsumoto, S. ; Aid, S.R. ; Sakaguchi, T. ; Toyonaga, K. ; Nakabayashi, Y. ; Sakuraba, M. ; Shimamune, Y. ; Hashiba, Y. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.425-436,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864