1.

Conference Proceedings
Conference Proceedings
1. Preparation and characterization of Yb3+ and Ho3+ codoped yttrium scandium gallium garnet nanocrystal powders by sol-gel method [5971B-65]
Yuan, D. ; Li, Z. ; Guo, S. ; Duan, X. ; Shi, X. ; Song, J.
Pub. info.: Photonic applications in nonlinear optics, nanophotonics, and microwave photonics : 12-14 September 2005, Toronto, Canada.  pp.59711K-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5971
2.

Conference Proceedings
Conference Proceedings
2. The effects of malicious nodes on performance of mobile ad hoc networks [6250-21]
Li, F. ; Shi, X. ; Jassim, S. ; Adams, C.
Pub. info.: Mobile multimedia/image processing for military and security applications : 20 April 2006, Kissimmee, Florida, USA.  pp.62500K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6250
3.

Conference Proceedings
Conference Proceedings
3. Enhancement of node connectivity for mobile ad hoc networks [6250-14]
Shi, X. ; Li, F. ; Adams, C.
Pub. info.: Mobile multimedia/image processing for military and security applications : 20 April 2006, Kissimmee, Florida, USA.  pp.62500H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6250
4.

Conference Proceedings
Conference Proceedings
4. Characterization of a preliminary narrow-band absorption material for holographic data storage
Dubois, M. ; Shi, X. ; Lawrence, B. L. ; Boden, E. ; Chan, K. P. ; Nielsen, M. ; Hesselink, L.
Pub. info.: Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA.  pp.589-596,  2004.  Bellingham.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5380
5.

Conference Proceedings
Conference Proceedings
5. Role of acid charge in chemically amplified resists
Shi, X.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.342-347,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
6.

Conference Proceedings
Conference Proceedings
6. Magnetic Recording Heads for 60 Gb/in 2 and Beyond
Liu, F.H. ; Stoev, K. ; Shi, X. ; Tong, H.C. ; Gibbons, M. ; Re, M.
Pub. info.: Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium.  pp.34-44,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-29
7.

Conference Proceedings
Conference Proceedings
7. Experimental study of line-end shortening
Shi, X. ; Socha, R. J. ; Bendik, J. ; Dusa, M. V. ; Conley, W. ; Su, B.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.777-784,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
8.

Conference Proceedings
Conference Proceedings
8. New Approaches to Spin Valve Head Materials and Its Future Trends
Tong, H.C. ; Qian, C. ; Miloslavsky, L. ; Shi, X. ; Liu, F. ; Huai, Y. ; Lederman, M. ; Dey, S.
Pub. info.: Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS).  pp.141-155,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-20
9.

Conference Proceedings
Conference Proceedings
9. Reduction of the Leakage Current of Thin-Film Transistor on Metal-Induced Laterally Crystallized Polycrystalline Silicon
Meng, Z. ; Wu, C. ; Xiong, S. ; Shi, X. ; Kwok, H.S. ; Wong, M.
Pub. info.: Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium.  pp.57-62,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-15
10.

Conference Proceedings
Conference Proceedings
10. Non-volatile holographic data storage media based on dye-doped thermoplastic [6282-69]
Erben, C. ; Shi, X. ; Boden, E. ; Longley, L. K. ; Lawrence, B. ; Wu, P.
Pub. info.: Optical Data Storage 2006 : 23-26 April 2006, Montreal, Canada.  pp.62821A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6282
11.

Conference Proceedings
Conference Proceedings
11. Micro-holograms recorded in a new thermoplastic medium for holographic data storage [6282-70]
Wu, P. ; Shi, X. ; Lawrence, B. ; Ren, Z. ; Smolenski, J. ; Erben, C. ; Boden, E. ; Longley, K.
Pub. info.: Optical Data Storage 2006 : 23-26 April 2006, Montreal, Canada.  pp.62821B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6282
12.

Conference Proceedings
Conference Proceedings
12. Compatibility of Polysilicon with HfO2-based Gate Dielectrics for CMOS Applications
Kaushik, V. ; De Gendt, S. ; Caymax, M. ; Young, E. ; Rohr, E. ; Van Elshocht, S. ; Delabie, A. ; Claes, M. ; Shi, X. ; Chen, I. ; Carter, R. ; Conard, T. ; Vandervorst, W. ; Schaekers, M. ; Heyns, M.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.391-396,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
13.

Conference Proceedings
Conference Proceedings
13. Rheological Response of Polystyrene/Ortho- Terphenyl Solutions
Shi, X. ; O'Connell, P. A. ; McKenna, G. B.
Pub. info.: ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10.  pp.1930-1934,  2001.  Brookfield Center, CT.  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 47
14.

Conference Proceedings
Conference Proceedings
14. Rheological Response of Polystyrene/Ortho-Terphenyl Solutions
Shi, X. ; O'Connell, P. A. ; McKenna, G. B.
Pub. info.: ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10.  pp.1930-1934,  2001.  Brookfield Center, CT.  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 47
15.

Conference Proceedings
Conference Proceedings
15. An enhanced Voronoi diagram method for segmentation of partially overlapped thin objects
Wu, Q.M.J. ; Shi, X. ; Jerbi, A. ; Grover, C.P.
Pub. info.: Applications of digital image processing XXI : 21-24 July 1998, San Diego, California.  pp.145-153,  1998.  Bellingham, Wash., USA.  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3460
16.

Conference Proceedings
Conference Proceedings
16. Optical Limiting Processes in Derivatized Fullerenes and Porphyrins/Phthalocyanines
Kohlman, R. ; Klimov, V. ; Shi, X. ; Grigorova, M. ; Mattes, B. R. ; McBranch, D. ; Wang, H. ; Wudl, F. ; Nogues, J-L. ; Moreshead, W.
Pub. info.: Electrical, optical, and magnetic properties of organic solid-state materials IV : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.237-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 488
17.

Conference Proceedings
Conference Proceedings
17. Electron Field Emission From Multilayered Tetrahedral Amorphous Carbon Films
Shi, X. ; Cheah, L. K. ; Silva, S. R. P. ; Tay, B. K. ; Yang, H. S. ; Sun, Z.
Pub. info.: Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A..  pp.215-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 498
18.

Conference Proceedings
Conference Proceedings
18. Tribological Behavior of Nanocomposite Diamondlike Carbon-Aluminum Films
Liu, E. ; Gao, J.X. ; Zeng, A.P. ; Tay, B.K. ; Shi, X.
Pub. info.: Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.231-238,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 695
19.

Conference Proceedings
Conference Proceedings
19. Mechanical Hole Burning Spectroscopy: A Comparison of Two Scenarios
McKenna, G.B. ; Shi, X.
Pub. info.: ANTEC 2003, annual technical conference, May 4-8, Nashville, Tennessee.  pp.947-953,  2003.  Brookfield Center, Conn..  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 61
20.

Conference Proceedings
Conference Proceedings
20. Effective Thermal Conductivity of MoSi2/SiC Composites
Bai, G. ; Jiang, W. ; Wang, G. ; Chen, L. ; Shi, X.
Pub. info.: Functionally graded materials VIII : proceedings of the 8th International Symposium on Multifunctional and Functionally Graded Materials (FGM2004) : held in Leuven, Belgium, 11-14 July 2004.  pp.551-554,  2005.  Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 492-493
21.

Conference Proceedings
Conference Proceedings
21. Properties of High-k and Extremely Thin Silicon Nitride Stacks
Zhang, Z. ; Fedorenko, Y. ; Truong, L. ; Shi, X. ; Afanas'ev, V. ; Stesmans, A. ; Campbell, S.A.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.375-388,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
22.

Conference Proceedings
Conference Proceedings
22. Deposition of undoped and in-situ doped amorphous and polycrystalline silicon with LPCVD
Schaekers, M. ; Shi, X.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.652-658,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
23.

Conference Proceedings
Conference Proceedings
23. Molecular Targeting of Nuclear Transcriptional Regulators
Rojanasakul, Yon ; Luo, Q. ; Ye, J. ; Faroonsargn, D. ; Dokka, S. ; Shi, X.
Pub. info.: Controlled drug delivery : designing technologies for the future.  pp.193-,  2000.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 752
24.

Conference Proceedings
Conference Proceedings
24. Dislocation Substructure in NiAl Single Crystals Deformed at Ambient Temperature
Shi, X. ; Pollock, T. M. ; Mahajan, S. ; Arunachalam, V. S.
Pub. info.: High-Temperature ordered intermetallic alloys VII : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.493-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 460
25.

Conference Proceedings
Conference Proceedings
25. Extending aggressive low-k1 design rule requirements for 90-nm and 65-nm nodes via simultaneous optimization of NA, illumination, and OPC
Roy, S. ; Van Den Broeke, D.J. ; Chen, J.F. ; Liebchen, A. ; Chen, T. ; Hsu, S.D. ; Shi, X. ; Socha, R.J.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.190-201,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
26.

Technical Paper
Technical Paper
26. Fluid Flow and Heat Transfer in a Lid- Driven Cavity Due to an Oscillatory Thin Fin: Periodic State.
Shi, X. ; Khodadadi, J. M.
Pub. info.: A.S.M.E. paper.  2004.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : HT-FED
Ser. no.: 2004
27.

Technical Paper
Technical Paper
27. NUMERICAL SIMULATION OF VORTEX BREAKDOWN
Shi, X.
Pub. info.: NASA Technical Reports.  (NASA-TM-77951),  pp.1-17,  1985.  National Aeronautics and Space Administration
28.

Technical Paper
Technical Paper
28. Effect of Injection Parameters on Spray Characteristics of Urea-SCR System.
Shi, X. ; Deng, J. ; Wu, Z. ; Li, L.
Pub. info.: 2013 SAE world congress : technical paper.  2013.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2013
29.

Technical Paper
Technical Paper
29. SOLAR NEUTRINOS AND THE MSW EFECT FOR THREE-NEUTRINO MIXING
Shi, X. ; Schramm, David N.
Pub. info.: NASA Technical Reports.  (NASA-CR-188706),  pp.1-31,  1991.  National Aeronautics and Space Adminstration
30.

Technical Paper
Technical Paper
30. DI Diesel Engine Combustion Modeling Based on ECFM-3Z Model.
Shi, X. ; Li, G. ; Zhou, L.
Pub. info.: 2007 Powertrain and Fluid Systems Conference and Exhibition : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
31.

Technical Paper
Technical Paper
31. Numerical Simulation and Experimental Study of Mixture Formation and Combustion Process in a DI Diesel Engine.
Shi, X. ; Li, G. ; Zhou, L.
Pub. info.: 14th Asia Pacific Automotive Engineering Conference : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
32.

Technical Paper
Technical Paper
32. An Ethanol SCR for NOx Purification: Performance Evaluation on Engine Bench and Demonstration on Bus.
Dong, H. ; Shuai, S. ; Zhang, W. ; Li, R. ; Wang, J. ; Shi, X. ; He, H.
Pub. info.: 2007 SAE world congress : technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
33.

Technical Paper
Technical Paper
33. Fluid Flow and Heat Transfer in a Lid- Driven Cavity Due to an Oscillatory Thin Fin: Transient Behavior.
Shi, X. ; Khodadadi, J. M.
Pub. info.: A.S.M.E. paper.  2004.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : HT-FED
Ser. no.: 2004
34.

Technical Paper
Technical Paper
34. Determination of the workspace of a general 6 DOF paralle manipulator
Fenton, R.G. ; Shi, X.
Pub. info.: SME technical paper series.  pp.1P-,  1991.  Society of Manufacturing Engineers
35.

Technical Paper
Technical Paper
35. Experimental Study on the Characteristics of Knock under DI-HCCI Combustion Mode with Ethanol/Gasoline Mixed Fuel.
Lin, Y. ; Shi, X. ; Deng, J. ; Chen, Y. ; Hu, M. ; Li, L.
Pub. info.: 2013 SAE world congress : technical paper.  2013.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2013
36.

Conference Proceedings
Conference Proceedings
36. Application of CPL with Interference Mapping Lithography to generate random contact reticle designs for the 65-nm node
Van Den Broeke, D.J. ; Laidig, T.L. ; Chen, J.F. ; Wampler, K.E. ; Hsu, S.D. ; Shi, X. ; Socha, R.J. ; Dusa, M.V. ; Corcoran, N.P.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.550-559,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
37.

Conference Proceedings
Conference Proceedings
37. RET masks for petterning 45nm node contact hole using ArF immersion lithography [6283-114]
Hsu, M. ; Chen, F. J. ; Van Den Broeke, D. ; En Tszng, S. ; Shieh, J. ; Hsu, S. ; Shi, X.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.628317-628317,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
38.

Conference Proceedings
Conference Proceedings
38. Studies on the preparation, structure, and spectral character of Yb3+, Er3+:YAG nanocrystal powders by sol-gel method [6343-99]
Li, Z. ; Yuan, D. ; Duan, X. ; Wang, L. ; Yu, F. ; Shi, X. ; Song, J.
Pub. info.: Photonics North 2006.  pp.63432T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6343
39.

Conference Proceedings
Conference Proceedings
39. A proposal for the contact hole assist feature printing checker in IML [5853-51]
Shieh, J. ; Socha, R. ; Shi, X. ; Chen, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.672-677,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
40.

Conference Proceedings
Conference Proceedings
40. Model-based scattering bars implementation for 65nm and 45nm nodes using IML technology [5853-50]
Hsu, M. ; Van Den Broeke, D. ; Laidig, T. ; Wampler, K. E. ; Hollerbach, U. ; Socha, R. ; Chen, J. F. ; Hsu, S. ; Shi, X.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.659-671,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
41.

Conference Proceedings
Conference Proceedings
41. Spectral and luminescence properties of Yb3+ and Er3+ codoped yttrium scandium gallium garnet [5970-49]
Guo, S. ; Yuan, D. ; Shi, X. ; Xue, M.
Pub. info.: Photonic Applications in Devices and Communication Systems.  pp.59701D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5970
42.

Conference Proceedings
Conference Proceedings
42. Thermoplastic media for holographic data storage (Invited Paper) [5939-11]
Shi, X. ; Lawrence, B. ; Dubois, M. ; Boden, E. P. ; Erben, C. ; Longley, K. L. ; Nielsen, M. C.
Pub. info.: Organic Holographic Materials and Applications III.  pp.59390A-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5939
43.

Conference Proceedings
Conference Proceedings
43. Dye-doped thermoplaslics for holographic data storage [6335-09]
Boden, E. P. ; Dubois, M. ; Shi, X. ; Lawrence, B. ; Erben, C. ; Longley, K. L.
Pub. info.: Organic Holographic Materials and Applications IV.  pp.633509-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6335
44.

Conference Proceedings
Conference Proceedings
44. Research and implementation of a shaking seat system for flight simulator [6358-148]
Shi, X. ; Yu, Y. ; Shen, W. ; Song, Z.
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation.  pp.635844-635844,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6358
45.

Conference Proceedings
Conference Proceedings
45. Optimizing and enhancing optical systems to meet the low k1 challenge
Flagello, D.G. ; Socha, R.J. ; Shi, X. ; Schoot, J.B. ; Baselmans, J. ; Kerkhof, M.A. ; Boeij, W. ; Engelen, A. ; Carpaij, R. ; Noordman, O. ; Moers, M.H.P. ; Mulder, M. ; Finders, J. ; Greevenbroek, H. ; Schriever, M. ; Maul, M. ; Haidner, H. ; Goeppert, M. ; Wegmann, U. ; Graeupner, P.
Pub. info.: Optical Microlithography XVI.  Part One  pp.139-150,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
46.

Conference Proceedings
Conference Proceedings
46. Patterning half-wavelength DRAM cell using chromeless phase lithography (CPL)
Hsu, C. ; Chu, R. ; Chen, J.F. ; Van Den Broeke, D.J. ; Shi, X. ; Hsu, S.D. ; Wang, T.
Pub. info.: Optical Microlithography XV.  Part One  pp.76-88,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
47.

Conference Proceedings
Conference Proceedings
47. Investigation of phase variation impact on CPL PSM for low k1 imaging
Lin, C. ; Hsu, M. ; Hsieh, F. ; Lin, S.Y. ; Hsu, S.D. ; Shi, X. ; Van Den Broeke, D.J. ; Chen, J.F. ; Tang, F.C. ; Hsieh, W.A. ; Huang, C.Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.804-811,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
48.

Conference Proceedings
Conference Proceedings
48. Low k1 lithography patterning option for the 90-nm and 65-nm nodes
Hsu, S.D. ; Van Den Broeke, D.J. ; Shi, X. ; Hsu, M. ; Wampler, K.E. ; Chen, J.F. ; Yu, A. ; Yang, S.C. ; Hsieh, F.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.812-828,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
49.

Conference Proceedings
Conference Proceedings
49. Dipole decomposition mask design for full-chip implementation at 100-nm technology node and beyond
Hsu, S.D. ; Corcoran, N.P. ; Eurlings, M. ; Knose, W.T. ; Laidig, T.L. ; Wampler, K.E. ; Roy, S. ; Shi, X. ; Hsu, C.M. ; Chen, J.F. ; Finders, J. ; Socha, R.J. ; Dusa, M.V.
Pub. info.: Optical Microlithography XV.  Part One  pp.476-490,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
50.

Conference Proceedings
Conference Proceedings
50. Resolution enhancement with high-transmission attenuating phase-shift masks
Socha, R. J. ; Conley, W. E. ; Shi, X. ; Dusa, M. V. ; Petersen, J. S. ; Chen, F. ; Wampler, K. E. ; Laidig, T. L. ; Caldwell, R. F.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.290-314,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748