Roy, S. ; Van Den Broeke, D.J. ; Chen, J.F. ; Liebchen, A. ; Chen, T. ; Hsu, S.D. ; Shi, X. ; Socha, R.J.
Pub. info.:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.190-201, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XI. pp.550-559, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lin, C. ; Hsu, M. ; Hsieh, F. ; Lin, S.Y. ; Hsu, S.D. ; Shi, X. ; Van Den Broeke, D.J. ; Chen, J.F. ; Tang, F.C. ; Hsieh, W.A. ; Huang, C.Y.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.804-811, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hsu, S.D. ; Van Den Broeke, D.J. ; Shi, X. ; Hsu, M. ; Wampler, K.E. ; Chen, J.F. ; Yu, A. ; Yang, S.C. ; Hsieh, F.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.812-828, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering