1.

Conference Proceedings
Conference Proceedings
1. Study of improvement of imaging quality in project photolithography with amplitude phase compound filtering
Chen, X. ; Kang, X. ; Luo, X. ; Shi, J.
Pub. info.: Semiconductor Optoelectronic Device Manufacturing and Applications.  pp.325-328,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4602
2.

Conference Proceedings
Conference Proceedings
2. Design of polarization-based interleaver filter for DWDM mux/demux
Shi, J. ; Chen, X. ; Zhong, X. ; Xia, Y. ; Chen, Y.
Pub. info.: Passive Components and Transmission Systems.  pp.348-355,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4581
3.

Conference Proceedings
Conference Proceedings
3. Study on improvement of resolution in photolithographic patterns with pupil phase-shift filtering
Chen, X. ; Shi, J. ; Luo, X. ; Kang, X. ; Qin, T.
Pub. info.: Third International Symposium on Multispectral Image Processing and Pattern Recognition.  pp.97-102,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5286