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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.659-669, 1994. Pennington, NJ. Electrochemical Society
Shen, B. ; Sekiguchi, T. ; Chen, P. ; Yang, K. ; Chen, Z. Z. ; Zheng, Y. D. ; Sumino, K.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.523-, 1997. Pittsburg, Pa.. MRS - Materials Research Society