1.

Conference Proceedings
Conference Proceedings
1. Stability of Shallow Junctions: Issue and Solution
Shao, L. ; Thompson, P.E. ; Wang, X.M ; Chen, H. ; Liu, J.R. ; Chu, W.-K.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.82-89,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
2.

Conference Proceedings
Conference Proceedings
2. Ultra-Shallow Junction Formation Via Thermal diffusion of Boron into High Energy Ion Irradiated Silicon
Shao, L. ; Lu, X.M. ; Wang, X.M. ; Liu, J.R. ; Chu, W.K.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.305-310,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
3.

Conference Proceedings
Conference Proceedings
3. Point Defect Engineering and its Application in Shallow Junction Formation
Shao, L. ; Liu, J.R. ; Thompson, P.E. ; Wang, X.M. ; Chen, I. Rusakova. H. ; Chu, W.-K.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.351-356,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11