1.

Conference Proceedings
Conference Proceedings
1. Electrochemical Deposition of Copper in Microstruetures
Soukane, S. ; Sen, S. ; Gale, T.
Pub. info.: Electrochemical science and technology of copper : proceedings of the international symposium.  pp.97-102,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-30
2.

Conference Proceedings
Conference Proceedings
2. Feature Scale Modeling of Transient Processes in Copper ECD
Sen, S. ; Blootnfield, M.O. ; Soukane, S. ; Cale, T.S.
Pub. info.: Thin film materials, processes, and reliability : proceedings of the international symposium.  pp.85-94,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-24