Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Karpov, S.Yu. ; Ramm, M.S. ; Segal, A.S. ; Makarov, Yu.A. ; Helava, H.
Pub. info.:
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.979-982, 2003. Zuerich, Switzerland. Trans Tech Publications
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.229-236, 2001. Pennington, N.J.. Electrochemical Society