Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.87-98, 2005. Pennington, N.J.. Electrochemical Society
Pasternak, R. ; Jun, B. ; Schrimpf, R.D. ; Fleetwood, D.M. ; Alles, M.A. ; Dolan, R.P. ; Standley, R.W. ; Tolk, N.H.
Pub. info.:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.383-388, 2005. Pennington, N.J.. Electrochemical Society