Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Leson, A.
Pub. info.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.75-84, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Weissbach, D.
Pub. info.:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II. pp.132-140, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Schreiber, J. ; Braun, S. ; Gatto, A. ; Schenk, H.
Pub. info.:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II. pp.114-122, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering