1.

Conference Proceedings

Conference Proceedings
Schindler, A. ; Haensel, T. ; Nickel, A. ; Thomas, H.-J. ; Lammert, H. ; Siewert, F.
Pub. info.: Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA.  pp.64-72,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5180
2.

Conference Proceedings

Conference Proceedings
Herold, V. ; Lammert, H. ; Schindler, A. ; Schwennicke, R. ; Siewert, F.
Pub. info.: Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany.  pp.596521-596521,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5965
3.

Conference Proceedings

Conference Proceedings
Siewert, F. ; Lammert, H. ; Noll, T. ; Schlegel, T. ; Zeschke, T. ; Hansel, T. ; Nickel, A. ; Schindler, A. ; Grubert, B. ; Schlewitt, C.
Pub. info.: Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA.  pp.592101-592101,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5921