1.

Conference Proceedings
Conference Proceedings
1. Annealing Kinetics of Implantation-Induced Amorphous Layer in 6H-SiC (0001)
Nakamura, T. ; Matsumoto, S. ; Horibe, T. ; Satoh, M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.839-842,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
2.

Conference Proceedings
Conference Proceedings
2. Annealing Kinetics of Implantation-Induced Amorphous Layer in 6H-SiC (0001)
Nakamura, T. ; Matsumoto, S. ; Horibe, T. ; Satoh, M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.839-842,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393