1.

Conference Proceedings
Conference Proceedings
1. Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space [6379-21]
Sato, K. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Photonic applications for aerospace, transportation, and harsh environments : 3 October 2006, Boston, Massachusetts, USA.  pp.637908-637908,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6379
2.

Conference Proceedings
Conference Proceedings
2. Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor
Goto, T. ; Yamada, A. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia.  pp.337-344,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4591
3.

Conference Proceedings
Conference Proceedings
3. Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity
Yamada, A. ; Tokita, T. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Integrated Optics: Devices, Materials, and Technologies VII.  pp.248-255,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4987
4.

Conference Proceedings
Conference Proceedings
4. Guided-wave optical pressure sensor responding only to changing pressure
Endo, Y. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Integrated Optics: Devices, Materials, and Technologies IX.  pp.309-316,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5728
5.

Conference Proceedings
Conference Proceedings
5. Optical microphone using a silicon-based guided-wave optical pressure sensor
Nikkuni, H. ; Dokko, S. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Integrated Optics: Devices, Materials, and Technologies IX.  pp.317-324,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5728
6.

Conference Proceedings
Conference Proceedings
6. Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor
Iwase, Y. ; Okamoto, Y. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Pub. info.: Integrated Optics: Devices, Materials, and Technologies VII.  pp.256-263,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4987