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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.328-335, 1997. Pennington, NJ. Electrochemical Society
Sakuma, J. ; Okui, Y. ; Miyazawa, H. ; Inoue, F. ; Miyajima, M.
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Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.245-, 1998. Warrendale, Pa. MRS - Materials Research Society