1.

Conference Proceedings
Conference Proceedings
1. 3D deformation analysis of flow and gas sensors membranes for reliability assessment
Sabate, N. ; Keller, J. ; Gollhardt, A. ; Vogel, D. ; Gracia, I. ; Cane, C. ; Morante, J. R. ; Michel, B.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.416-424,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Low-cost thermal flow sensor for home-appliances applications
Sabate, N. ; Gracia, I. ; Cane, C. ; Berganzo, J. ; Puicorbe, J. ; Morante, J.R.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.549-555,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
3.

Conference Proceedings
Conference Proceedings
3. Compatibility of gas and flow sensor technology fabrication
Sabate, N. ; Gracia, I. ; Cane, C. ; Puigcorbe, J. ; Cerda, J. ; Morante, J.R. ; Berganzo, J.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.120-127,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116