1.

Conference Proceedings
Conference Proceedings
1. Mask quality assurance in cleaning for haze elimination using flexible mask specifications
K. Otsubo ; S. Yamaguchi ; Y. Arisawa ; H. Mukai ; T. Kotani ; H. Mashita ; H. Hashimoto ; T. Kamo ; T. Tsutsui ; O. Ikenaga
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
2.

Conference Proceedings
Conference Proceedings
2. Mask defect printability in the spacer patterning process
S. Miyoshi ; S. Yamaguchi ; T. Hirano ; H. Mashita ; H. Mukai
Pub. info.: Photomask technology 2008.  1  pp.71220P-1-71220P-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
3.

Conference Proceedings
Conference Proceedings
3. A study of mask specification in spacer patterning technology
H. Mukai ; Y. Kobayashi ; S. Yamaguchi ; K. Kawano ; K. Hashimoto
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702812-1-702812-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
4.

Conference Proceedings
Conference Proceedings
4. Mask specification guidelines in spacer patterning technology
K. Hashimoto ; H. Mukai ; S. Miyoshi ; S. Yamaguchi ; H. Mashita
Pub. info.: Lithography Asia 2008.  2  pp.714022-1-714022-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
5.

Conference Proceedings
Conference Proceedings
5. Accuracy of mask pattern contour extraction with fine-pixel SEM images
S. Yamaguchi ; E. Yamanaka ; H. Mukai ; T. Kotani ; H. Mashita
Pub. info.: Photomask technology 2007.  2  pp.673036-1-673036-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730