1.

Conference Proceedings
Conference Proceedings
1. Advanced TiN Metal-Gate FinFET Technology
Y. Liu ; E. Sugimata ; T. Matsukawa ; M. Masahara ; K. Endo ; I. Kenichi ; T. Shimizu ; H. Yamauchi ; S. Ouchi ; E. Suzuki
Pub. info.: Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing.  pp.197-208,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(1)
2.

Conference Proceedings
Conference Proceedings
2. Advanced Metal Gate FinFET CMOS TEchnology
Y. Liu ; T. Matsukawa ; K. Endo ; M. Masahara ; S. Ouchi
Pub. info.: Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing.  pp.239-252,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 13(2)