1.

Conference Proceedings
Conference Proceedings
1. Process window aware layout optimization using hot spot fixing system
S. Kobayashi ; S. Kyoh ; T. Kotani ; S. Inoue
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
2.

Conference Proceedings
Conference Proceedings
2. Accurate model base verification scheme to eliminate hotspots and manage warmspots
S. Nojima ; S. Kyoh ; S. Maeda ; S. Inoue
Pub. info.: Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA.  pp.69250Z-1-69250Z-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6925
3.

Conference Proceedings
Conference Proceedings
3. Systematic yield estimation method applying lithography simulation
S. Kyoh ; S. Inoue
Pub. info.: Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA.  pp.69250Q-1-69250Q-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6925