1.

Conference Proceedings

Conference Proceedings
P.F. Carcia ; R. McLean ; M. Groner ; A. Dameron ; S. George
Pub. info.: Atomic layer deposition applications 3.  pp.15-21,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
2.

Conference Proceedings

Conference Proceedings
S. George ; A. Dameron ; Y. Du ; N.M. Adamczyk ; S. Davidson
Pub. info.: Atomic layer deposition applications 3.  pp.81-90,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)